| 10/00 | Scanning or positioning arrangements, i.e. arrangements for actively controlling the movement or position of the probe |
| 10/02 | Scanning or positioning arrangements, i.e. arrangements for actively controlling the movement or position of the probe Coarse scanning or positioning |
| 10/04 | Scanning or positioning arrangements, i.e. arrangements for actively controlling the movement or position of the probe Fine scanning or positioning |
| 10/06 | Scanning or positioning arrangements, i.e. arrangements for actively controlling the movement or position of the probe Fine scanning or positioning Circuits or algorithms therefor |
| 20/00 | Monitoring the movement or position of the probe |
| 20/02 | Monitoring the movement or position of the probe by optical means |
| 20/04 | Monitoring the movement or position of the probe Self-detecting probes, i.e. wherein the probe itself generates a signal representative of its position, e.g. piezo-electric gauge |
| 30/00 | Auxiliary means serving to assist or improve the scanning probe techniques or apparatus, e.g. display or data processing devices |
| 30/02 | Auxiliary means serving to assist or improve the scanning probe techniques or apparatus, e.g. display or data processing devices Non-SPM analysing devices, e.g. SEM [Scanning Electron Microscope], spectrometer or optical microscope |
| 30/04 | Auxiliary means serving to assist or improve the scanning probe techniques or apparatus, e.g. display or data processing devices Display or data processing devices |
| 30/06 | Auxiliary means serving to assist or improve the scanning probe techniques or apparatus, e.g. display or data processing devices Display or data processing devices for error compensation |
| 30/08 | Auxiliary means serving to assist or improve the scanning probe techniques or apparatus, e.g. display or data processing devices Means for establishing or regulating a desired environmental condition within a sample chamber |
| 30/10 | Auxiliary means serving to assist or improve the scanning probe techniques or apparatus, e.g. display or data processing devices Means for establishing or regulating a desired environmental condition within a sample chamber Thermal environment |
| 30/12 | Auxiliary means serving to assist or improve the scanning probe techniques or apparatus, e.g. display or data processing devices Means for establishing or regulating a desired environmental condition within a sample chamber Fluid environment |
| 30/14 | Auxiliary means serving to assist or improve the scanning probe techniques or apparatus, e.g. display or data processing devices Means for establishing or regulating a desired environmental condition within a sample chamber Fluid environment Liquid environment |
| 30/16 | Auxiliary means serving to assist or improve the scanning probe techniques or apparatus, e.g. display or data processing devices Means for establishing or regulating a desired environmental condition within a sample chamber Vacuum environment |
| 30/18 | Auxiliary means serving to assist or improve the scanning probe techniques or apparatus, e.g. display or data processing devices Means for protecting or isolating the interior of a sample chamber from external environmental conditions or influences, e.g. vibrations or electromagnetic fields |
| 30/20 | Auxiliary means serving to assist or improve the scanning probe techniques or apparatus, e.g. display or data processing devices Sample handling devices or methods |
| 40/00 | Calibration, e.g. of probes |
| 40/02 | Calibration, e.g. of probes Calibration standards or methods of fabrication thereof |