| 1/00 | Devices without movable or flexible elements, e.g. micro-capillary devices |
| 3/00 | Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes (B81B 5/00 takes precedence) |
| 5/00 | Devices comprising elements which are movable in relation to each other, e.g. comprising slidable or rotatable elements |
| 7/00 | Micro-structural systems |
| 7/02 | Micro-structural systems containing distinct electrical or optical devices of particular relevance for their function, e.g. micro-electro-mechanical systems (MEMS) (B81B 7/04 takes precedence) |
| 7/04 | Micro-structural systems Networks or arrays of similar micro-structural devices |