| 2025/0119,112 | Micro-Mechanical Resonator Having Out-of-Phase and Out-of-Plane Flexural Mode Resonator Portions | Dec 17, 24 | Apr 10, 25 | Agilent Technologies Texas Instruments Incorporated |
| 2025/0096,768 | METAL RIBS IN ELECTROMECHANICAL DEVICES | Dec 03, 24 | Mar 20, 25 | Not available |
| 2025/0096,774 | ELECTRONIC PACKAGE STRUCTURE | Dec 03, 24 | Mar 20, 25 | Advanced Semiconductor Engineering, Inc. |
| 2025/0023,534 | Fabrication Method for a Thin-Film Layer on a Substrate | Nov 28, 22 | Jan 16, 25 | Not available |
| 2025/0007,492 | MICROELECTROMECHANICAL RESONATOR | Jan 15, 24 | Jan 02, 25 | Not available |
| 2024/0339,985 | TEMPERATURE-STABLE MEMS RESONATOR | Sep 01, 22 | Oct 10, 24 | Not available |
| 2024/0297,630 | ION IRRADIATION OF MICROELECTROMECHANICAL RESONATORS | Feb 22, 24 | Sep 05, 24 | Government of the United States, as represented by the Secretary of the Air Force |
| 2024/0154,598 | MEMS RESONATOR AND MEMS RESONATOR PROCESSING METHOD | Mar 10, 22 | May 09, 24 | Not available |
| 2024/0125,599 | FUSED QUARTZ DUAL SHELL RESONATOR AND METHOD OF FABRICATION | Jul 06, 23 | Apr 18, 24 | The Regents of the University of California |
| 2024/0128,948 | RESONANCE DEVICE AND METHOD FOR MANUFACTURING SAME | Dec 28, 23 | Apr 18, 24 | Not available |
| 2024/0056,054 | Non-Lid-Bonded MEMS Resonator With Phosphorus Dopant | Aug 14, 23 | Feb 15, 24 | Not available |
| 2024/0039,500 | Micro-Mechanical Resonator Having Out-of-Phase and Out-of-Plane Flexural Mode Resonator Portions | Jul 29, 22 | Feb 01, 24 | Not available |
| 2024/0019,249 | Three Dimensional Microstructures With Selectively Removed Regions For Use In Gyroscopes And Other Devices | Jun 13, 23 | Jan 18, 24 | The Regents of the University of Michigan |
| 2023/0416,081 | MEMS RESONATOR | Jun 23, 23 | Dec 28, 23 | Not available |
| 2023/0361,741 | RESONANCE DEVICE AND MANUFACTURING METHOD FOR THE SAME | Jul 17, 23 | Nov 09, 23 | Not available |
| 2022/0368,301 | METHOD OF MANUFACTURING COLLECTIVE SUBSTRATE AND COLLECTIVE SUBSTRATE | Jul 21, 22 | Nov 17, 22 | Not available |
| 2022/0158,601 | Vibrator Device And Method For Manufacturing Vibrator Device | Nov 15, 21 | May 19, 22 | Not available |
| 2022/0158,602 | MICRO-RESONATOR DESIGN IMPLEMENTING INTERNAL RESONANCE FOR MEMS APPLICATIONS | Mar 13, 20 | May 19, 22 | Not available |
| 2021/0167,745 | METHOD FOR MANUFACTURING A MICROMECHANICAL LAYER STRUCTURE | Dec 06, 18 | Jun 03, 21 | Not available |
| 2021/0159,868 | HIGH ELECTROMECHANICAL COUPLING STRENGTH HOLLOW DISK RESONATORS | Nov 13, 20 | May 27, 21 | The Regents of the University of California |