| 2024/0297,474 | SHUTTER APPARATUS HAVING PORTS TO CONTROL ENERGY BEAM AND GAS TRANSFER BETWEEN ZONES | Feb 29, 24 | Sep 05, 24 | Not available |
| 2024/0291,226 | GAS CONTROL APPARATUS FOR GAS DISCHARGE STAGE | Jun 02, 22 | Aug 29, 24 | Not available |
| 2024/0235,144 | Dustproof structure for laser output window of laser, and laser | Mar 13, 24 | Jul 11, 24 | BEIJING RSLASER OPTO-ELECTRONICS TECHNOLOGY CO., LTD. |
| 2024/0146,011 | GAS LASER DEVICE AND ELECTRONIC DEVICE MANUFACTURING METHOD | Jan 10, 24 | May 02, 24 | Gigaphoton Inc. |
| 2024/0128,705 | GAS LASER AMPLIFIER, GAS LASER APPARATUS, EUV LIGHT GENERATION APPARATUS, AND EUV EXPOSURE APPARATUS | Nov 11, 19 | Apr 18, 24 | Mitsubishi Electric Corporation |
| 2024/0120,700 | CO2 BEAM SOURCE COMPRISING A CATALYST | Dec 18, 23 | Apr 11, 24 | Not available |
| 2024/0035,514 | BEARING APPARATUS AND LASER APPARATUS COMPRISING BEARING APPARATUS | Jul 24, 23 | Feb 01, 24 | Not available |
| 2024/0039,228 | REDUCING ENERGY CONSUMPTION OF A GAS DISCHARGE CHAMBER BLOWER | Dec 09, 21 | Feb 01, 24 | Not available |
| 2023/0387,642 | CHAMBER DEVICE, GAS LASER DEVICE, AND ELECTRONIC DEVICE MANUFACTURING METHOD | Aug 10, 23 | Nov 30, 23 | Gigaphoton Inc. |
| 2023/0163,551 | CONDUIT SYSTEM, RADIATION SOURCE, LITHOGRAPHIC APPARATUS, AND METHODS THEREOF | Mar 09, 21 | May 25, 23 | Not available |
| 2022/0385,022 | LINE NARROWING GAS LASER DEVICE, CONTROL METHOD THEREOF, AND ELECTRONIC DEVICE MANUFACTURING METHOD | Aug 08, 22 | Dec 01, 22 | Gigaphoton Inc. |
| 2022/0385,031 | CONTROLLING A SPECTRAL PROPERTY OF AN OUTPUT LIGHT BEAM PRODUCED BY AN OPTICAL SOURCE | Oct 16, 20 | Dec 01, 22 | Not available |
| 2022/0376,455 | LASER DEVICE AND ELECTRONIC DEVICE MANUFACTURING METHOD | Aug 05, 22 | Nov 24, 22 | Gigaphoton Inc. |
| 2022/0285,902 | GAS CONTROL METHOD AND RELATED USES | Sep 10, 20 | Sep 08, 22 | Not available |
| 2022/0255,286 | CONTROL SYSTEM FOR A PLURALITY OF DEEP ULTRAVIOLET OPTICAL OSCILLATORS | May 15, 20 | Aug 11, 22 | Not available |
| 2021/0367,390 | GAS LASER APPARATUS, AND ELECTRONIC DEVICE MANUFACTURING METHOD | Aug 10, 21 | Nov 25, 21 | Gigaphoton Inc. |
| 2021/0336,403 | GAS LASER APPARATUS, LASER BEAM EMITTING METHOD OF GAS LASER APPARATUS, AND ELECTRONIC DEVICE MANUFACTURING METHOD | Jul 09, 21 | Oct 28, 21 | Gigaphoton Inc. |
| 2021/0057,864 | ENHANCED WAVEGUIDE SURFACE IN GAS LASERS | Aug 06, 20 | Feb 25, 21 | Not available |
| 2020/0403,370 | CONTROLLING PRESSURE IN A CAVITY OF A LIGHT SOURCE | Dec 18, 19 | Dec 24, 20 | Not available |
| 2020/0403,371 | LASER GAS REGENERATING APPARATUS AND ELECTRONIC DEVICE MANUFACTURING METHOD | Sep 01, 20 | Dec 24, 20 | Gigaphoton Inc. |