| 2025/0076,770 | NEW DESIGN OF EUV VESSEL PERIMETER FLOW AUTO ADJUSTMENT | Nov 14, 24 | Mar 06, 25 | Taiwan Semiconductor Manufacturing Company Ltd. |
| 2025/0060,526 | SIGNAL MANIPULATION ELEMENTS INTEGRATED WITH WINDOW PLATE FOR OPTICAL FEEDTHROUGH TO VACUUM | Jun 27, 24 | Feb 20, 25 | Not available |
| 2025/0062,048 | X-RAY IRRADIATION APPARATUS, INCLUDING A SPECTRALLY SHAPING X-RAY OPTIC AND A SPECTRAL FILTER APERTURE DEVICE, FOR X-RAY IMAGING | Dec 19, 22 | Feb 20, 25 | Not available |
| 2025/0046,488 | CONIC ZONEPLATE FABRICATION TECHNIQUE | Aug 01, 24 | Feb 06, 25 | UChicago Argonne, LLC |
| 2025/0037,895 | ACCELERATOR-DRIVENNEUTRON ACTIVATOR FOR BACHYTHERAPY | Oct 14, 24 | Jan 30, 25 | Not available |
| 2025/0014,772 | OPTICS-INTEGRATED CONFINEMENT APPARATUS INCLUDING POLARIZATION CONTROLLING OPTICAL ELEMENTS | Jun 05, 24 | Jan 09, 25 | Not available |
| 2024/0377,752 | SYSTEM AND METHOD FOR MONITORING AND CONTROLLING EXTREME ULTRAVIOLET PHOTOLITHOGRAPHY PROCESSES | Jul 23, 24 | Nov 14, 24 | Not available |
| 2024/0379,259 | EUV LITHOGRAPHY APPARATUS | Jul 23, 24 | Nov 14, 24 | Taiwan Semiconductor Manufacturing Company Ltd. |
| 2024/0371,540 | SYSTEMS AND METHODS FOR ASSEMBLING ELECTRON SPIN AND CHARGE TO POSSESS PROPERTIES OF A MAGNETIC MONOPOLE | Apr 22, 22 | Nov 07, 24 | Not available |
| 2024/0372,033 | Guiding of Spontaneous Emissions | May 01, 24 | Nov 07, 24 | Not available |
| 2024/0353,353 | MULTI-LAYER HIGH-ASPECT RATIO X-RAY GRATING AND METHOD OF MANUFACTURE | Aug 17, 22 | Oct 24, 24 | Not available |
| 2024/0297,048 | HIGH-ASPECT RATIO METALLIZED STRUCTURES | May 07, 24 | Sep 05, 24 | Not available |
| 2024/0288,388 | Soft X-Ray Optics With Improved Filtering | May 07, 24 | Aug 29, 24 | Not available |
| 2024/0274,313 | STRUCTURES FOR PATTERNING SUBSTRATES AND METHODS AND SYSTEMS FOR THEIR MANUFACTURE | Feb 02, 24 | Aug 15, 24 | Not available |
| 2024/0221,969 | STRUCTURED WAVE GENERATOR AND DEVICE FOR DIFFRACTING A NEUTRON BEAM INTO A STRUCTURED WAVE | Jun 15, 23 | Jul 04, 24 | Not available |
| 2024/0194,367 | Device and Method for Generating Optical Tweezers | Dec 06, 23 | Jun 13, 24 | UNIVERSITÄT STUTTGART; Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V.; |
| 2024/0160,107 | EXTREME ULTRAVIOLET LIGHT GENERATION CHAMBER DEVICE AND ELECTRONIC DEVICE MANUFACTURING METHOD | Sep 28, 23 | May 16, 24 | Gigaphoton Inc. |
| 2024/0112,826 | METHOD FOR DESIGNING MIRROR AND ASTIGMATISM CONTROL MIRROR HAVING REFLECTING SURFACE SATISFYING DESIGN FORMULA IN SAID DESIGNING METHOD | Jan 11, 22 | Apr 04, 24 | The University of Tokyo |
| 2024/0062,928 | SYSTEM AND METHOD FOR BENDING CRYSTAL WAFERS FOR USE IN HIGH RESOLUTION ANALYZERS | Aug 19, 22 | Feb 22, 24 | UChicago Argonne, LLC |
| 2024/0047,092 | APERTURE FOR ELECTROMAGNETIC RADIATION, METHOD FOR ALIGNING AN APERTURE, SYSTEM FOR APPLYING ELECTROMAGNETIC RADIATION ONTO A SOURCE MATERIAL AND DISPERSING ELEMENT | Sep 11, 19 | Feb 08, 24 | Not available |