2025/0102,898 | REFLECTIVE MASK BLANK AND MANUFACTURING METHOD OF REFLECTIVE MASK | Sep 04, 24 | Mar 27, 25 | Shin-Etsu Chemical Co., Ltd. |
2025/0036,020 | REFLECTIVE MASK BLANK, REFLECTIVE MASK BLANK MANUFACTURING METHOD, REFLECTIVE MASK, AND REFLECTIVE MASK MANUFACTURING METHOD | Oct 09, 24 | Jan 30, 25 | AGC Inc. |
2024/0427,226 | REFLECTIVE MASK BLANK, REFLECTIVE MASK, AND MANUFACTURING METHOD THEREFOR | Sep 03, 24 | Dec 26, 24 | AGC Inc. |
2024/0377,720 | EUV Lithography Mask With A Porous Reflective Multilayer Structure | Jul 22, 24 | Nov 14, 24 | Not available |
2024/0377,722 | MASK AND METHOD OF FORMING THE SAME | Jul 22, 24 | Nov 14, 24 | Taiwan Semiconductor Manufacturing Company Ltd. |
2024/0295,807 | REFLECTIVE MASK BLANK, REFLECTIVE MASK, METHOD OF MANUFACTURING REFLECTIVE MASK BLANK, AND METHOD OF MANUFACTURING REFLECTIVE MASK | Apr 29, 24 | Sep 05, 24 | AGC Inc. |
2024/0280,890 | REFLECTIVE MASK BLANK, REFLECTIVE MASK, METHOD OF MANUFACTURING REFLECTIVE MASK BLANK, AND METHOD OF MANUFACTURING REFLECTIVE MASK | Apr 29, 24 | Aug 22, 24 | AGC Inc. |
2024/0248,387 | METHOD AND SYSTEM TO INTRODUCE BRIGHT FIELD IMAGING AT STITCHING AREA OF HIGH-NA EUV EXPOSURE | May 05, 23 | Jul 25, 24 | Not available |
2024/0201,576 | REFLECTIVE MASK BLANK FOR EUV LITHOGRAPHY | Feb 29, 24 | Jun 20, 24 | AGC Inc. |
2024/0176,225 | REFLECTIVE MASK BLANK AND REFLECTIVE MASK | Jan 19, 24 | May 30, 24 | AGC INC. |
2024/0152,003 | DISPLAY PANEL, METHOD OF MANUFACTURING DISPLAY PANEL, AND PHOTOMASK | Mar 29, 23 | May 09, 24 | TCL China Star Optoelectronics Technology Co.,Ltd. |
2024/0094,622 | REFLECTIVE MASK BLANK, REFLECTIVE MASK, METHOD OF MANUFACTURING REFLECTIVE MASK BLANK, AND METHOD OF MANUFACTURING REFLECTIVE MASK | Nov 22, 23 | Mar 21, 24 | AGC Inc. |
2024/0085,779 | METHOD AND APPARATUS FOR QUALIFYING A MASK FOR USE IN LITHOGRAPHY | Sep 08, 23 | Mar 14, 24 | Not available |
2024/0045,320 | REFLECTIVE MASK BLANK, REFLECTIVE MASK, METHOD OF MANUFACTURING REFLECTIVE MASK BLANK, AND METHOD OF MANUFACTURING REFLECTIVE MASK | Oct 20, 23 | Feb 08, 24 | AGC Inc. |
2022/0397,817 | REFLECTIVE PHOTOMASK BLANK AND REFLECTIVE PHOTOMASK | Nov 25, 20 | Dec 15, 22 | Not available |
2022/0236,636 | REFLECTIVE MASK BLANK AND REFLECTIVE MASK | Apr 11, 22 | Jul 28, 22 | AGC INC. |
2021/0325,775 | METHOD AND APPARATUS FOR REPAIRING DEFECTS OF A PHOTOLITHOGRAPHIC MASK FOR THE EUV RANGE | Jun 28, 21 | Oct 21, 21 | Not available |
2021/0165,316 | PHOTOLITHOGRAPHY METHOD | Jun 19, 20 | Jun 03, 21 | Samsung Electronics Co., Ltd. |
2021/0103,210 | MASK AND METHOD OF FORMING THE SAME | Nov 23, 20 | Apr 08, 21 | Taiwan Semiconductor Manufacturing Company Ltd. |
2021/0018,828 | MASK AND METHOD FOR FORMING THE SAME | Jul 16, 19 | Jan 21, 21 | Not available |