G03F 1/52

Technology



back to "G03F 1/52" profile

More Results

Showing 1 to 20 of 46 results

Patent/Pub #TitleFiling DateIssue/Publication DatePatent Owner
2025/0102,898 REFLECTIVE MASK BLANK AND MANUFACTURING METHOD OF REFLECTIVE MASKSep 04, 24Mar 27, 25Shin-Etsu Chemical Co., Ltd.
2025/0036,020 REFLECTIVE MASK BLANK, REFLECTIVE MASK BLANK MANUFACTURING METHOD, REFLECTIVE MASK, AND REFLECTIVE MASK MANUFACTURING METHODOct 09, 24Jan 30, 25AGC Inc.
2024/0427,226 REFLECTIVE MASK BLANK, REFLECTIVE MASK, AND MANUFACTURING METHOD THEREFORSep 03, 24Dec 26, 24AGC Inc.
2024/0377,720 EUV Lithography Mask With A Porous Reflective Multilayer StructureJul 22, 24Nov 14, 24Not available
2024/0377,722 MASK AND METHOD OF FORMING THE SAMEJul 22, 24Nov 14, 24Taiwan Semiconductor Manufacturing Company Ltd.
2024/0295,807 REFLECTIVE MASK BLANK, REFLECTIVE MASK, METHOD OF MANUFACTURING REFLECTIVE MASK BLANK, AND METHOD OF MANUFACTURING REFLECTIVE MASKApr 29, 24Sep 05, 24AGC Inc.
2024/0280,890 REFLECTIVE MASK BLANK, REFLECTIVE MASK, METHOD OF MANUFACTURING REFLECTIVE MASK BLANK, AND METHOD OF MANUFACTURING REFLECTIVE MASKApr 29, 24Aug 22, 24AGC Inc.
2024/0248,387 METHOD AND SYSTEM TO INTRODUCE BRIGHT FIELD IMAGING AT STITCHING AREA OF HIGH-NA EUV EXPOSUREMay 05, 23Jul 25, 24Not available
2024/0201,576 REFLECTIVE MASK BLANK FOR EUV LITHOGRAPHYFeb 29, 24Jun 20, 24AGC Inc.
2024/0176,225 REFLECTIVE MASK BLANK AND REFLECTIVE MASKJan 19, 24May 30, 24AGC INC.
2024/0152,003 DISPLAY PANEL, METHOD OF MANUFACTURING DISPLAY PANEL, AND PHOTOMASKMar 29, 23May 09, 24TCL China Star Optoelectronics Technology Co.,Ltd.
2024/0094,622 REFLECTIVE MASK BLANK, REFLECTIVE MASK, METHOD OF MANUFACTURING REFLECTIVE MASK BLANK, AND METHOD OF MANUFACTURING REFLECTIVE MASKNov 22, 23Mar 21, 24AGC Inc.
2024/0085,779 METHOD AND APPARATUS FOR QUALIFYING A MASK FOR USE IN LITHOGRAPHYSep 08, 23Mar 14, 24Not available
2024/0045,320 REFLECTIVE MASK BLANK, REFLECTIVE MASK, METHOD OF MANUFACTURING REFLECTIVE MASK BLANK, AND METHOD OF MANUFACTURING REFLECTIVE MASKOct 20, 23Feb 08, 24AGC Inc.
2022/0397,817 REFLECTIVE PHOTOMASK BLANK AND REFLECTIVE PHOTOMASKNov 25, 20Dec 15, 22Not available
2022/0236,636 REFLECTIVE MASK BLANK AND REFLECTIVE MASKApr 11, 22Jul 28, 22AGC INC.
2021/0325,775 METHOD AND APPARATUS FOR REPAIRING DEFECTS OF A PHOTOLITHOGRAPHIC MASK FOR THE EUV RANGEJun 28, 21Oct 21, 21Not available
2021/0165,316 PHOTOLITHOGRAPHY METHODJun 19, 20Jun 03, 21Samsung Electronics Co., Ltd.
2021/0103,210 MASK AND METHOD OF FORMING THE SAMENov 23, 20Apr 08, 21Taiwan Semiconductor Manufacturing Company Ltd.
2021/0018,828 MASK AND METHOD FOR FORMING THE SAMEJul 16, 19Jan 21, 21Not available

Showing 1 to 20 of 46 results