| 2025/0093,764 | EXTREME ULTRAVIOLET MASK | Nov 27, 24 | Mar 20, 25 | Taiwan Semiconductor Manufacturing Company Ltd. |
| 2024/0319,578 | REFLECTIVE MASK BLANK, REFLECTIVE MASK, AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE | May 31, 24 | Sep 26, 24 | 501 Hoya Corporation |
| 2024/0319,609 | Optical Lithography System and Method of Using the Same | Jun 04, 24 | Sep 26, 24 | Not available |
| 2024/0142,869 | ALUMINUM OXIDE CARBON HYBRID HARDMASKS AND METHODS FOR MAKING THE SAME | Aug 24, 23 | May 02, 24 | Not available |
| 2024/0142,870 | ALUMINUM OXIDE CARBON HYBRID HARDMASKS AND METHODS FOR MAKING THE SAME | Aug 24, 23 | May 02, 24 | Applied Materials Inc. |
| 2024/0063,060 | PATTERNING METHOD AND STRUCTURES RESULTING THEREFROM | Nov 03, 23 | Feb 22, 24 | Not available |
| 2023/0367,195 | EXTREME ULTRAVIOLET MASK AND METHOD OF MANUFACTURING THE SAME | Jul 24, 23 | Nov 16, 23 | Not available |
| 2023/0341,761 | ANTI-REFLECTION WITH INTERCONNECTED STRUCTURES | Oct 26, 21 | Oct 26, 23 | Not available |
| 2023/0185,184 | HARDMASK STRUCTURE FOR PREPARING SEMICONDUCTOR STRUCTURE | Dec 10, 21 | Jun 15, 23 | Not available |
| 2023/0110,529 | BLANK MASK AND PHOTOMASK USING THE SAME | Oct 05, 22 | Apr 13, 23 | SKC solmics Co., Ltd. |
| 2020/0161,132 | REFLECTION MODE PHOTOMASK | Jan 27, 20 | May 21, 20 | Not available |
| 2018/0335,692 | PHASE-SHIFT BLANKMASK AND PHASE-SHIFT PHOTOMASK | May 09, 18 | Nov 22, 18 | S&S TECH CO., LTD. |
| 2017/0075,211 | MASK BLANK | Aug 08, 16 | Mar 16, 17 | ASAHI GLASS COMPANY, LIMITED |
| 2016/0013,058 | Semiconductor Mask Blanks with a Compatible Stop Layer | Sep 17, 15 | Jan 14, 16 | TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD. |
| 2015/0370,158 | Image Mask Film Scheme and Method | Aug 31, 15 | Dec 24, 15 | Not available |
| 2015/0309,401 | LITHOGRAPHY SYSTEM AND METHOD FOR PATTERNING PHOTORESIST LAYER ON EUV MASK | Apr 25, 14 | Oct 29, 15 | TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD. |
| 2015/0309,403 | ANTIREFLECTIVE COATING COMPOSITIONS AND PROCESSES THEREOF | Apr 29, 14 | Oct 29, 15 | AZ ELECTRONIC MATERIALS (LUXEMBOURG) S.A.R.L. |
| 2015/0160,549 | PHOTOMASK BLANK | Dec 05, 14 | Jun 11, 15 | SHIN-ETSU CHEMICAL CO., LTD. |
| 2015/0093,689 | BLANKMASK AND PHOTOMASK | Oct 01, 14 | Apr 02, 15 | S&S TECH CO., LTD. |
| 2014/0239,516 | Carbosilane Polymer Compositions for Anti-Reflective Coatings | May 05, 14 | Aug 28, 14 | BRAGGONE OY |