G03F 1/42

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Patent/Pub #TitleFiling DateIssue/Publication DatePatent Owner
2025/0116,941 STITCHING METHOD FOR EXPOSURE PROCESSNov 14, 23Apr 10, 25Powerchip Semiconductor Manufacturing Corporation; AP Memory Technology Corporation;
2025/0096,146 PHOTOLITHOGRAPHY METHOD AND STRUCTURES THEREOFJan 24, 24Mar 20, 25Not available
2025/0060,660 LITHOGRAPHY MASK HAVING OVERLAY MARK AND RELATED METHODJan 03, 24Feb 20, 25Not available
2024/0411,221 PHOTOMASK SET, DESIGN METHOD THEREOF, AND MANUFACTURING METHOD OF PHOTORESIST PATTERNJul 03, 23Dec 12, 24United Microelectronics Corp.
2024/0411,223 METHOD FOR PROCESSING DC MARKS FOR REPAIRING LITHOGRAPHY MASKSJun 06, 24Dec 12, 24Not available
2024/0377,755 MULTIPLE-MASK MULTIPLE-EXPOSURE LITHOGRAPHY AND MASKSJul 22, 24Nov 14, 24Not available
2024/0369,919 PATTERNING DEVICE FOR A LITHOGRAPHIC APPARATUS AND METHODMar 09, 22Nov 07, 24ASML Netherlands B.V.
2024/0361,350 PARTICLE IMAGE VELOCIMETRY OF EXTREME ULTRAVIOLET LITHOGRAPHY SYSTEMSJul 11, 24Oct 31, 24Taiwan Semiconductor Manufacturing Company Ltd.
2024/0345,470 MASK, EXPOSURE METHOD AND TOUCH PANELJun 25, 24Oct 17, 24Not available
2024/0310,722 METHODS AND APPARATUSES FOR PROCESSING A LITHOGRAPHIC OBJECTMay 20, 24Sep 19, 24Not available
2024/0241,451 METHOD OF MEASURING OVERLAY AND SEMICONDUCTOR DEVICE MANUFACTURED USING THE SAMEDec 05, 23Jul 18, 24Not available
2024/0219,848 EXTREME ULTRAVIOLET EXPOSURE APPARATUS INCLUDING A MASK STAGENov 27, 23Jul 04, 24Not available
2024/0203,796 METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICENov 14, 23Jun 20, 24Not available
2024/0186,258 PHOTOLITHOGRAPHY ALIGNMENT PROCESS FOR BONDED WAFERSJan 24, 24Jun 06, 24Not available
2024/0170,504 PHOTOMASK, DISPLAY DEVICE, AND MANUFACTURING METHOD THEREOFJan 25, 24May 23, 24Not available
2024/0162,142 DIAGONAL VIA MANUFACTURING METHODJan 24, 24May 16, 24Not available
2024/0094,624 PATTERN FORMATION METHOD, SEMICONDUCTOR DEVICE MANUFACTURING METHOD, AND IMPRINT APPARATUSAug 29, 23Mar 21, 24Not available
2024/0094,625 PHOTOMASK INCLUDING FIDUCIAL MARK AND METHOD OF MAKING A PHOTOMASKNov 29, 23Mar 21, 24Not available
2024/0085,776 PHOTOLITHOGRAPHY MASK AND PHOTOLITHOGRAPHY SYSTEM COMPRISING SAID PHOTOLITHOGRAPHY MASKMar 31, 22Mar 14, 24Not available
2024/0085,778 PHOTOMASK INCLUDING LINE PATTERN MONITORING MARK AND METHOD OF MANUFACTURING INTEGRATED CIRCUIT DEVICE USING THE SAMEMay 16, 23Mar 14, 24Not available

Showing 1 to 20 of 122 results