| 2024/0337,919 | MASK BLANK, PHASE SHIFT MASK, AND METHOD FOR PRODUCING SEMICONDUCTOR DEVICE | Jun 30, 22 | Oct 10, 24 | 501 Hoya Corporation |
| 2024/0310,717 | PHASE SHIFT MASK FOR EUV LITHOGRAPHY AND MANUFACTURING METHOD FOR THE PHASE SHIFT MASK | May 20, 24 | Sep 19, 24 | SK HYNIX INC. |
| 2022/0397,818 | PHASE SHIFT MASK FOR EUV LITHOGRAPHY AND MANUFACTURING METHOD FOR THE PHASE SHIFT MASK | Nov 17, 21 | Dec 15, 22 | SK HYNIX INC. |
| 2019/0302,604 | MASK BLANK, PHASE SHIFT MASK, METHOD OF MANUFACTURING PHASE SHIFT MASK, AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE | Sep 04, 17 | Oct 03, 19 | 501 Hoya Corporation |
| 2018/0321,582 | PHOTOMASK AND METHODS FOR MANUFACTURING AND CORRECTING PHOTOMASK | Jul 12, 18 | Nov 08, 18 | Not available |
| 2017/0192,348 | PHASE SHIFT MASK AND METHOD OF FORMING PATTERNS USING THE SAME | Mar 20, 17 | Jul 06, 17 | SAMSUNG DISPLAY CO., LTD. |
| 2017/0068,155 | MASK BLANK, METHOD OF MANUFACTURING PHASE SHIFT MASK, PHASE SHIFT MASK, AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE | Feb 24, 15 | Mar 09, 17 | HOYA CORPORATION |
| 2016/0124,299 | TRANSMISSION BALANCING FOR PHASE SHIFT MASK WITH A TRIM MASK | Oct 30, 14 | May 05, 16 | SEAGATE TECHNOLOGY LLC |
| 2015/0177,612 | MASK AND METHOD FOR FORMING THE SAME | Mar 03, 15 | Jun 25, 15 | TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD. |
| 2013/0323,627 | Photomasks, Methods Of Forming A Photomask, And Methods Of Photolithographically Patterning A Substrate | Jun 04, 12 | Dec 05, 13 | MICRON TECHNOLOGY, INC. |
| 2013/0280,644 | MASK AND METHOD FOR FORMING THE SAME | Apr 20, 12 | Oct 24, 13 | TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD. |
| 2012/0228,743 | Methods of Manufacturing Semiconductor Devices and Optical Proximity Correction | May 24, 12 | Sep 13, 12 | INFINEON TECHNOLOGIES AG |