G03F 1/26

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Patent/Pub #TitleFiling DateIssue/Publication DatePatent Owner
2025/0068,054 Mask and Reticle Protection with Atomic Layer Deposition (ALD)Nov 13, 24Feb 27, 25Not available
2024/0427,228 PHOTOMASK BLANK, PHOTOMASK, AND MANUFACTURING METHOD OF PHOTOMASKJun 12, 24Dec 26, 24Kioxia Corporation
2024/0419,064 PHASE SHIFT MASK AND METHOD FOR MANUFACTURING PHASE SHIFT MASKJan 30, 23Dec 19, 24Not available
2024/0377,722 MASK AND METHOD OF FORMING THE SAMEJul 22, 24Nov 14, 24Taiwan Semiconductor Manufacturing Company Ltd.
2024/0345,467 BLANK MASK AND METHOD OF FABRICATING THE SAMEApr 17, 24Oct 17, 24Not available
2024/0302,732 PHASE SHIFT MASK BLANK, PHASE SHIFT MASK, AND METHOD FOR MANUFACTURING PHASE SHIFT MASKMar 15, 22Sep 12, 24Not available
2024/0295,807 REFLECTIVE MASK BLANK, REFLECTIVE MASK, METHOD OF MANUFACTURING REFLECTIVE MASK BLANK, AND METHOD OF MANUFACTURING REFLECTIVE MASKApr 29, 24Sep 05, 24AGC Inc.
2024/0168,370 REFLECTIVE MASK BLANK, REFLECTIVE MASK, METHOD OF MANUFACTURING REFLECTIVE MASK BLANK, AND METHOD OF MANUFACTURING REFLECTIVE MASKOct 20, 23May 23, 24AGC Inc.
2024/0126,162 PHASE SHIFT BLANKMASK AND PHOTOMASK FOR EUV LITHOGRAPHYNov 17, 22Apr 18, 24S&S TECH CO., LTD.
2024/0126,163 PHASE SHIFT BLANKMASK AND PHOTOMASK FOR EUV LITHOGRAPHYJan 24, 23Apr 18, 24S&S TECH CO., LTD.
2024/0103,354 REFLECTIVE MASK BLANK AND REFLECTIVE MASKDec 01, 23Mar 28, 24501 Hoya Corporation
2024/0103,355 REFLECTIVE MASK BLANK, REFLECTIVE MASK AND METHOD FOR MANUFACTURING A SEMICONDUCTOR DEVICEDec 04, 23Mar 28, 24501 Hoya Corporation
2024/0094,622 REFLECTIVE MASK BLANK, REFLECTIVE MASK, METHOD OF MANUFACTURING REFLECTIVE MASK BLANK, AND METHOD OF MANUFACTURING REFLECTIVE MASKNov 22, 23Mar 21, 24AGC Inc.
2024/0012,322 PHOTOMASK STRUCTUREJul 31, 22Jan 11, 24United Microelectronics Corp.
2023/0367,199 Reflective Photomask Blank, and Method for Manufacturing Reflective PhotomaskApr 27, 23Nov 16, 23Shin-Etsu Chemical Co., Ltd.
2023/0333,461 PHASE SHIFT MASK BLANK, PHASE SHIFT MASK, AND METHOD FOR MANUFACTURING PHASE SHIFT MASKSep 07, 21Oct 19, 23Not available
2023/0259,014 MASK AND METHOD OF FORMING THE SAMEApr 27, 23Aug 17, 23Taiwan Semiconductor Manufacturing Company Ltd.
2023/0236,494 REFLECTIVE HOLOGRAPHIC PHASE MASKSJan 25, 23Jul 27, 23Not available
2023/0168,574 LAMINATE FOR BLANK MASK AND MANUFACTURING METHOD FOR THE SAMENov 28, 22Jun 01, 23SKC solmics Co., Ltd.
2023/0099,176 MASK BLANK, TRANSFER MASK, AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICEDec 02, 22Mar 30, 23501 Hoya Corporation

Showing 1 to 20 of 160 results