| 2025/0116,920 | ELECTROCONDUCTIVE-FILM-COATED SUBSTRATE AND REFLECTIVE MASK BLANK | Dec 16, 24 | Apr 10, 25 | AGC Inc. |
| 2025/0102,898 | REFLECTIVE MASK BLANK AND MANUFACTURING METHOD OF REFLECTIVE MASK | Sep 04, 24 | Mar 27, 25 | Shin-Etsu Chemical Co., Ltd. |
| 2025/0093,762 | EUV LITHOGRAPHY MASKS AND METHODS | Feb 06, 24 | Mar 20, 25 | Not available |
| 2025/0093,763 | PHOTOMASK AND METHOD OF MANUFACTURING INTEGRATED CIRCUIT DEVICE BY USING THE SAME | Aug 29, 24 | Mar 20, 25 | Not available |
| 2025/0093,764 | EXTREME ULTRAVIOLET MASK | Nov 27, 24 | Mar 20, 25 | Taiwan Semiconductor Manufacturing Company Ltd. |
| 2025/0085,622 | Extreme Ultraviolet (EUV) Mask and Method of Fabrication Thereof | Jan 18, 24 | Mar 13, 25 | Not available |
| 2025/0076,748 | REFLECTIVE MASK BLANK FOR EUV LITHOGRAPHY AND SUBSTRATE EQUIPPED WITH CONDUCTIVE FILM | Nov 15, 24 | Mar 06, 25 | AGC Inc. |
| 2025/0068,050 | PHOTOMASK ASSEMBLY AND SEMICONDUCTOR CHIP MANUFACTURED USING THE SAME | May 30, 24 | Feb 27, 25 | Not available |
| 2025/0068,054 | Mask and Reticle Protection with Atomic Layer Deposition (ALD) | Nov 13, 24 | Feb 27, 25 | Not available |
| 2025/0060,658 | REFLECTIVE MASK BLANK AND MANUFACTURING METHOD OF REFLECTIVE MASK | Aug 02, 24 | Feb 20, 25 | Shin-Etsu Chemical Co., Ltd. |
| 2025/0060,659 | REFLECTIVE MASK BLANK AND MANUFACTURING METHOD OF REFLECTIVE MASK | Aug 02, 24 | Feb 20, 25 | Shin-Etsu Chemical Co., Ltd. |
| 2025/0053,076 | EXTREME ULTRAVIOLET LIGHT REFLECTIVE STRUCTURE INCLUDING NANO-LATTICE AND MANUFACTURING METHOD THEREOF | Oct 30, 24 | Feb 13, 25 | Taiwan Semiconductor Manufacturing Company Ltd. |
| 2025/0044,679 | PUPIL FILTER WITH SPATIALLY-VARYING TRANSMISSION | Jul 31, 23 | Feb 06, 25 | Not available |
| 2025/0036,019 | EUV RETICLE WITH EMBEDDED PROCESS ASSISTANCE LAYER AND METHOD OF MANUFACTURING THE EUV RETICLE | Jul 28, 23 | Jan 30, 25 | Not available |
| 2025/0036,020 | REFLECTIVE MASK BLANK, REFLECTIVE MASK BLANK MANUFACTURING METHOD, REFLECTIVE MASK, AND REFLECTIVE MASK MANUFACTURING METHOD | Oct 09, 24 | Jan 30, 25 | AGC Inc. |
| 2025/0004,360 | REFLECTIVE MASK BLANK AND REFLECTIVE MASK | Sep 13, 24 | Jan 02, 25 | AGC Inc. |
| 2025/0004,362 | PELLICLE MEMBRANE | Jul 28, 22 | Jan 02, 25 | ASML NETHERLANDS B.V. |
| 2024/0427,226 | REFLECTIVE MASK BLANK, REFLECTIVE MASK, AND MANUFACTURING METHOD THEREFOR | Sep 03, 24 | Dec 26, 24 | AGC Inc. |
| 2024/0427,227 | REFLECTIVE MASK BLANK, REFLECTIVE MASK, METHOD OF MANUFACTURING REFLECTIVE MASK BLANK, AND METHOD OF MANUFACTURING REFLECTIVE MASK | Sep 03, 24 | Dec 26, 24 | AGC Inc. |
| 2024/0419,063 | REFLECTIVE MASK BLANK, REFLECTIVE MASK, AND MANUFACTURING METHOD THEREFOR | Aug 29, 24 | Dec 19, 24 | AGC Inc. |