| 2025/0091,860 | COMPOUND SENSOR AND MANUFACTURING METHOD | Apr 05, 24 | Mar 20, 25 | Not available |
| 2025/0008,220 | MEMS-based Imaging Devices | Jun 29, 23 | Jan 02, 25 | Microsoft Technology Licensing, LLC. |
| 2024/0417,242 | METHODS OF MANUFACTURE OF MEMS MIRROR ARRAYS WITH REDUCED CROSSTALK | Aug 30, 24 | Dec 19, 24 | CALIENT.AI INC. |
| 2024/0277,252 | MULTIPLEXED ANTIGEN-BASED DETECTION OF SARS-COV-2 AND OTHER DISEASES USING NANOMECHANICAL SENSORS | Jun 22, 22 | Aug 22, 24 | Not available |
| 2024/0262,681 | DUAL MICRO-ELECTRO MECHANICAL SYSTEM AND MANUFACTURING METHOD THEREOF | Apr 19, 24 | Aug 08, 24 | Taiwan Semiconductor Manufacturing Company Ltd. |
| 2024/0140,022 | DIGITAL LIGHT PROCESSING 3D PRINTED MONOLITHIC SUBSTRATES WITH INTEGRATED AND EMBEDDED SENSORS | Oct 31, 22 | May 02, 24 | Toyota Motor Engineering & Manufacturing North America, Inc.; Georgia Tech Research Corporation; Toyota Jidosha Kabushiki Kaisha; |
| 2024/0025,733 | MEMS MIRROR ARRAYS WITH REDUCED COUPLING BETWEEN MIRRORS | Jul 14, 23 | Jan 25, 24 | Calient Technologies, Inc. |
| 2022/0380,204 | DEVICE, METHOD AND COMPUTER-READABLE RECORDING MEDIUM FOR DETECTING EARTHQUAKE IN MEMS-BASED AUXILIARY SEISMIC OBSERVATION NETWORK | Aug 09, 22 | Dec 01, 22 | Not available |
| 2022/0227,621 | MEMS MIRROR ARRAYS WITH REDUCED CROSSTALK AND METHODS OF MANUFACTURE | Jan 11, 22 | Jul 21, 22 | Calient Technologies, Inc. |
| 2021/0382,085 | COMBINED CORRUGATED PIEZOELECTRIC MICROPHONE AND CORRUGATED PIEZOELECTRIC VIBRATION SENSOR | Jun 09, 20 | Dec 09, 21 | Not available |
| 2021/0354,981 | MICROMECHANICAL SENSOR UNIT AND METHOD FOR MANUFACTURING A MICROMECHANICAL SENSOR UNIT | Dec 17, 19 | Nov 18, 21 | Not available |
| 2021/0130,167 | DUAL MICRO-ELECTRO MECHANICAL SYSTEM AND MANUFACTURING METHOD THEREOF | Jul 24, 20 | May 06, 21 | Not available |
| 2021/0114,868 | Bionic SERS substrate with metal-based compound eye bowl structure and its construction method and application | Oct 28, 20 | Apr 22, 21 | Not available |
| 2021/0047,174 | METHOD AND SYSTEM FOR SENSOR CONFIGURATION | Jun 24, 20 | Feb 18, 21 | Not available |
| 2021/0041,475 | ELECTROSTATIC ACTUATOR AND PHYSICAL QUANTITY SENSOR | Oct 28, 20 | Feb 11, 21 | Not available |
| 2020/0339,415 | ARTIFICIAL MATERIAL | May 11, 20 | Oct 29, 20 | Not available |
| 2020/0180,947 | METHOD FOR SETTING A PRESSURE IN A CAVERN FORMED WITH THE AID OF A SUBSTRATE AND OF A SUBSTRATE CAP, SEMICONDUCTOR SYSTEM, IN PARTICULAR, WAFER SYSTEM | Dec 02, 19 | Jun 11, 20 | Not available |
| 2019/0318,885 | MICROELECTROMECHANICAL DEVICE, WHICH CAN BE USED AS NON-VOLATILE MEMORY MODULE OR RELAY, AND MEMORY INCLUDING A PLURALITY OF MICROELECTROMECHANICAL DEVICES | Jun 26, 19 | Oct 17, 19 | Not available |
| 2019/0119,104 | MICROELECTROMECHANICAL SYSTEM (MEMS) DEVICES | Jul 13, 16 | Apr 25, 19 | Hewlett-Packard Company |
| 2018/0186,626 | SYSTEM FOR CONTROLLING THE APPLICATION OF ENERGY TO A CONSTRUCTION COMPONENT | Dec 29, 17 | Jul 05, 18 | Not available |