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| 9998035 | Resonant energy harvester, aircraft component comprising the resonant energy harvester and an aircraft comprising the resonant energy harvester or the aircraft component | Dec 18, 14 | Jun 12, 18 | Airbus Defence and Space GmbH |
| 9991076 | Electromechanical device | Jan 28, 14 | Jun 05, 18 | Massachusetts Institute of Technology |
| 9986343 | Apparatus and methods for individual addressing and noise reduction in actuator arrays | Jul 14, 16 | May 29, 18 | AUDIO PIXELS LTD. |
| 9979323 | Variable frequency electrostatic drive | Nov 22, 17 | May 22, 18 | Wisconsin Alumni Research Foundation |
| 9973111 | Graphene sheet and nanomechanical resonator | Apr 25, 16 | May 15, 18 | Elwha LLC |
| 9960713 | Impact producing actuator and touch panel | Oct 05, 15 | May 01, 18 | SMK Corporation |
| 9960719 | Variable frequency electrostatic drive | Mar 08, 17 | May 01, 18 | Wisconsin Alumni Research Foundation |
| 9954463 | Energy conversion device using change of contact surface with liquid | Nov 25, 13 | Apr 24, 18 | Korea Electronics Technology Institute |
| 9953625 | Electrostatic capacitance transducer, probe, and subject information acquiring device | Jul 09, 14 | Apr 24, 18 | CANON KABUSHIKI KAISHA |
| 9945458 | Actuator using expansion or contraction to produce linear or rotary motion | Jun 19, 13 | Apr 17, 18 | Genesis Robotics LLP |
| 9948212 | Method and technique to control MEMS DVC control waveform for lifetime enhancement | May 16, 14 | Apr 17, 18 | CAVENDISH KINETICS INC. |
| 9937528 | Capacitive micromachined ultrasonic transducer (CMUT) forming | Apr 11, 16 | Apr 10, 18 | Agilent Technologies Texas Instruments Incorporated |
| 9929678 | Electrostatic energy-harvesting device having 3-dimensional cone shape | Jan 08, 15 | Mar 27, 18 | Research & Business Foundation Sungkyunkwan University |
| 9923545 | Compound spring MEMS resonators for frequency and timing generation | Oct 14, 15 | Mar 20, 18 | MICROCHIP TECHNOLOGY INCORPORATED |
| 9921405 | Electrostatically actuated oscillating structure with oscillation starting phase control, and manufacturing and driving method thereof | Jan 09, 17 | Mar 20, 18 | STMICROELECTRONICS INTERNATIONAL N.V., STMICROELECTRONICS S.R.L., |
| 9917535 | Wafer and method of manufacturing the same | May 30, 13 | Mar 13, 18 | KONINKLIJKE PHILIPS N.V. |
| 9910262 | Actuator control device, optical module, electronic apparatus, and actuator control method | Jan 23, 15 | Mar 06, 18 | SEIKO EPSON CORPORATION |
| 9912255 | Electrostatic actuator, variable capacitance capacitor, electric switch, and method for driving electrostatic actuator | Apr 09, 12 | Mar 06, 18 | PIONEER CORPORATION, PIONEER MICRO TECHNOLOGY CORPORATION, |
| 9899937 | Peg-style electrostatic rotating machine | Jan 16, 15 | Feb 20, 18 | WISCONSIN ALUMNI RESEARCH FOUNDATION |