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9948054 | Vacuum container of laser oscillator | Aug 05, 16 | Apr 17, 18 | FANUC CORPORATION |
9825417 | Laser unit and non-transitory computer-readable storage medium | May 02, 16 | Nov 21, 17 | GIGAPHOTON INC. |
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9722385 | Laser chamber | Jun 30, 16 | Aug 01, 17 | GIGAPHOTON INC. |
9680277 | Slab amplifier, and laser apparatus and extreme ultraviolet light generation apparatus including slab amplifier | Mar 13, 15 | Jun 13, 17 | GIGAPHOTON INC. |
9664898 | Laser device and method for marking an object | Jul 19, 12 | May 30, 17 | ALLTEC ANGEWANDTE LASERLICHT TECHNOLOGIE GMBH |
9653869 | Optical surface preservation techniques and apparatus | Oct 25, 13 | May 16, 17 | UNIVERSITY OF NEW HAMPSHIRE |
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9573223 | Marking apparatus with a plurality of gas lasers with resonator tubes and individually adjustable deflection means | Jul 19, 12 | Feb 21, 17 | ALLTEC ANGEWANDTE LASERLICHT TECHNOLOGIE GMBH |
9573227 | Marking apparatus with a plurality of lasers, deflection means, and telescopic means for each laser beam | Jul 19, 12 | Feb 21, 17 | ALLTEC ANGEWANDTE LASERLICHT TECHNOLOGIE GMBH, ALLTEC ANGEWANDTE LASERLIGHT TECHNOLOGIE GMBH, |
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9515446 | Gas laser device | Dec 27, 13 | Dec 06, 16 | MITSUBISHI ELECTRIC CORPORATION |
9502850 | Gas laser device | Mar 06, 14 | Nov 22, 16 | MITSUBISHI ELECTRIC CORPORATION |
9484703 | Gas circulation loop for a laser discharge tube | Sep 24, 13 | Nov 01, 16 | LASER SYSTEMS & SOLUTIONS OF EUROPE |