G21K 1/16

Technology

Patent/Pub #	Title	Filing Date	Issue/Publication Date	Patent Owner
9955563	EUV light source for generating a usable output beam for a projection exposure apparatus	Mar 03, 15	Apr 24, 18	Carl Zeiss SMT GmbH
9928929	Apparatus for generating focused electromagnetic radiation	Apr 17, 17	Mar 27, 18	OXBRIDGE PULSAR SOURCES LIMITED
9633754	Apparatus for generating focused electromagnetic radiation	Mar 27, 06	Apr 25, 17	OXBRIDGE PULSAR SOURCES LTD.
9442303	Polarized ultraviolet light splitting element	Aug 29, 13	Sep 13, 16	LG CHEM, LTD.
9235137	Illumination optical unit for microlithography	Feb 10, 12	Jan 12, 16	CARL ZEISS SMT GMBH
8781076	Phase controller	Dec 28, 10	Jul 15, 14	SAITAMA MEDICAL UNIVERSITY

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Number of patents in all portfolios	100 (maximum)	1000 (maximum)	2000 (maximum)	Unlimited
Follows in all categories (Watch)	10 (maximum)	50 (maximum)	500 (maximum)	Unlimited
Maximum number of portfolios	5 (maximum)	10 (maximum)	100 (maximum)	Unlimited
Maximum number of comparisons	1 (maximum)	5 (maximum)	20 (maximum)	Unlimited

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Number of patents in all portfolios	100 (maximum)	1000 (maximum)	2000 (maximum)	Unlimited
Watches in all categories (Watch)	10 (maximum)	50 (maximum)	500 (maximum)	Unlimited
Maximum number of portfolios	5 (maximum)	10 (maximum)	100 (maximum)	Unlimited
Maximum number of comparisons	1 (maximum)	5 (maximum)	20 (maximum)	Unlimited

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Number of patents in all portfolios	100 (maximum)	1000 (maximum)	2000 (maximum)	Unlimited
Follows in all categories (Watch)	10 (maximum)	50 (maximum)	500 (maximum)	Unlimited
Maximum number of portfolios	5 (maximum)	10 (maximum)	100 (maximum)	Unlimited
Maximum number of comparisons	1 (maximum)	5 (maximum)	20 (maximum)	Unlimited