| 9996013 | Extreme ultraviolet lithography process and mask | Jun 27, 16 | Jun 12, 18 | Taiwan Semiconductor Manufacturing Company, Ltd. |
| 9972781 | Method of manufacturing mask and method of manufacturing display device | Mar 29, 16 | May 15, 18 | SAMSUNG DISPLAY CO., LTD. |
| 9971238 | Mask blank, phase shift mask, and production method thereof | Jan 29, 15 | May 15, 18 | Dai Nippon Printing Co., Ltd. |
| 9964847 | Mask substrate structure | Jun 20, 16 | May 08, 18 | Globalfoundries Inc. |
| 9952498 | Mask blank, and transfer mask | Sep 21, 16 | Apr 24, 18 | 501 Hoya Corporation |
| 9952497 | Mask blank and method of manufacturing phase shift mask | Oct 06, 16 | Apr 24, 18 | HOYA CORPORATION |
| 9939725 | Method and device for producing masks for a laser installation | Nov 22, 10 | Apr 10, 18 | Boegli - Gravures SA |
| 9891518 | Mask | Nov 19, 14 | Feb 13, 18 | BEIJING BOE OPTOELECTRONICS TECHNOLOGY CO., LTD., BOE TECHNOLOGY GROUP CO., LTD., |
| 9885950 | Phase shift mask, method for manufacturing the same, and method for forming micro pattern | Apr 20, 15 | Feb 06, 18 | SAMSUNG DISPLAY CO., LTD. |
| 9851633 | Inorganic material film, photomask blank, and method for manufacturing photomask | Jun 23, 16 | Dec 26, 17 | SHIN-ETSU CHEMICAL CO., LTD. |
| 9798053 | Mask plate, color filter substrate and method for fabricating the same, display panel and display device | Mar 29, 16 | Oct 24, 17 | BOE TECHNOLOGY GROUP CO., LTD., HEFEI BOE OPTOELECTRONICS TECHNOLOGY CO., LTD., |
| 9798230 | Photomask blank | Sep 11, 15 | Oct 24, 17 | SHIN-ETSU CHEMICAL CO., LTD. |
| 9766537 | Mask | Apr 14, 15 | Sep 19, 17 | BEIJING BOE OPTOELECTRONICS TECHNOLOGY CO., LTD., BOE TECHNOLOGY GROUP CO., LTD., |
| 9766540 | Method of forming photomask | Dec 22, 15 | Sep 19, 17 | SAMSUNG ELECTRONICS CO., LTD. |
| 9766546 | Method of producing a resist structure with undercut sidewall | Jul 25, 14 | Sep 19, 17 | AMS AG |
| 9754794 | Plasmonic nano-lithography based on attenuated total reflection | Sep 03, 12 | Sep 05, 17 | EMPIRE TECHNOLOGY DEVELOPMENT LLC |
| 9709884 | EUV mask and manufacturing method by using the same | Jun 11, 15 | Jul 18, 17 | TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD. |
| 9689066 | Photomask blank manufacturing method, photomask blank, photomask, and pattern transfer method | May 13, 13 | Jun 27, 17 | SHIN-ETSU CHEMICAL CO., LTD. |
| 9664996 | Photomasks for reducing thermal stress generated by heat | Jun 17, 15 | May 30, 17 | SK HYNIX INC. |
| 9651858 | Binary photomask blank, preparation thereof, and preparation of binary photomask | Jul 14, 15 | May 16, 17 | SHIN-ETSU CHEMICAL CO., LTD. |