G03F 1/50

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Patent/Pub #TitleFiling DateIssue/Publication DatePatent Owner
9996000 Test pattern layout for test photomask and method for evaluating critical dimension changesApr 08, 16Jun 12, 18International Business Machine Corporation; Toppan Printing Co., Ltd.;
9989843 Test pattern layout for test photomask and method for evaluating critical dimension changesApr 08, 16Jun 05, 18International Business Machine Corporation; Toppan Printing Co., Ltd.;
9983480 Method of manufacturing a structure on a substrateSep 20, 16May 29, 18Ushio Denki Kabushiki Kaisha
9982333 Mask frame assembly and method of manufacturing the sameMar 03, 15May 29, 18Samsung Display Co., Ltd.
9978595 Photo mask and exposure systemFeb 16, 16May 22, 18BOE Technology Group Co. Ltd.; Chengdu Boe Optoelectronics Technology Co., Ltd.;
9952501 Photomask blank, making method, and photomaskSep 02, 16Apr 24, 18Shin-Etsu Chemical Co. Ltd.
9946151 Method for producing a mask and the maskAug 11, 15Apr 17, 18BOE Technology Group Co. Ltd.
9904169 Photomask blank, resist pattern forming process, and method for making photomaskApr 04, 16Feb 27, 18SHIN-ETSU CHEMICAL CO., LTD.
9905762 Display substrate and fabricating method thereof, and system for fabricating display substrate and display deviceApr 01, 16Feb 27, 18BOE TECHNOLOGY GROUP CO., LTD., ORDOS YUANSHENG OPTOELECTRONICS CO., LTD.,
9897909 Mask blank substrate, substrate with multilayer reflection film, transmissive mask blank, reflective mask blank, transmissive mask, reflective mask, and semiconductor device fabrication methodApr 21, 16Feb 20, 18HOYA CORPORATION
9891463 Mask for forming color filter layer, method for fabricating color filter substrate, and color filter substrateJun 14, 13Feb 13, 18BEIJING BOE DISPLAY TECHNOLOGY CO., LTD., BOE TECHNOLOGY GROUP CO., LTD.,
9881808 Mask and pattern forming methodDec 28, 15Jan 30, 18TOSHIBA MEMORY CORPORATION
9880461 Method for manufacturing master mold, master mold manufactured thereby, method for manufacturing transparent photomask, transparent photomask manufactured thereby, and method for forming conductive mesh pattern using transparent photomaskFeb 13, 15Jan 30, 18LG CHEM, LTD.
9874808 Mask blank, mask blank with negative resist film, phase shift mask, and method for producing pattern formed body using sameAug 21, 14Jan 23, 18DAI NIPPON PRINTING CO., LTD.
9864266 Photomask blankAug 17, 16Jan 09, 18SHIN-ETSU CHEMICAL CO., LTD.
9864269 Photomask blankAug 17, 16Jan 09, 18SHIN-ETSU CHEMICAL CO., LTD.
9857687 Method of manufacturing substrate and substrate and mask filmFeb 26, 14Jan 02, 18YAMATOYA & CO., LTD., TOKAI SHINEI ELECTRONICS INDUSTRY CO., LTD., TOKAI SHINEI ELECTRONICS INIDUSTRY CO., LTD,
9851633 Inorganic material film, photomask blank, and method for manufacturing photomaskJun 23, 16Dec 26, 17SHIN-ETSU CHEMICAL CO., LTD.
9841669 Method for forming conductive mesh pattern, and mesh electrode and laminate manufactured therebyFeb 13, 15Dec 12, 17LG CHEM, LTD.
9835939 Gray-tone masks and the manufacturing method thereofJun 30, 15Dec 05, 17SHENZHEN CHINA STAR OPTOELECTRONICS TECHNOLOGY CO., LTD.

Showing 1 to 20 of 165 results