G03F 1/26

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Showing 1 to 20 of 123 results

Patent/Pub #TitleFiling DateIssue/Publication DatePatent Owner
RE47535 Method and apparatus for accommodating device and/or signal mismatch in a sensor arrayApr 09, 14Jul 23, 19Dolby Laboratories Licensing Corporation
9964847 Mask substrate structureJun 20, 16May 08, 18Globalfoundries Inc.
9952498 Mask blank, and transfer maskSep 21, 16Apr 24, 18501 Hoya Corporation
9953833 Semiconductor mask blanks with a compatible stop layerSep 17, 15Apr 24, 18Taiwan Semiconductor Manufacturing Co Ltd.
9952497 Mask blank and method of manufacturing phase shift maskOct 06, 16Apr 24, 18HOYA CORPORATION
9946153 Mask blank and transfer maskSep 19, 16Apr 17, 18501 Hoya Corporation
9933698 Mask blank, phase-shift mask and method for manufacturing semiconductor deviceDec 09, 14Apr 03, 18501 Hoya Corporation
9927694 Pattern data generation method, pattern data generation device, and maskMar 14, 16Mar 27, 18TOSHIBA MEMORY CORPORATION
9921467 Mask blank and mask and fabrication method thereofNov 30, 15Mar 20, 18TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
9915866 Focused radiation beam induced depositionNov 16, 15Mar 13, 18TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
9910350 Method for repairing a maskNov 16, 15Mar 06, 18TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
9897911 Halftone phase shift photomask blank, making method, and halftone phase shift photomaskAug 09, 16Feb 20, 18SHIN-ETSU CHEMICAL CO., LTD.
9897910 Treating a capping layer of a maskDec 30, 16Feb 20, 18TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
9885950 Phase shift mask, method for manufacturing the same, and method for forming micro patternApr 20, 15Feb 06, 18SAMSUNG DISPLAY CO., LTD.
9881808 Mask and pattern forming methodDec 28, 15Jan 30, 18TOSHIBA MEMORY CORPORATION
9870612 Method for repairing a maskSep 01, 16Jan 16, 18TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
9864267 Reflective mask blank, reflective mask, and method for manufacturing semiconductor deviceNov 26, 14Jan 09, 18HOYA CORPORATION
9864266 Photomask blankAug 17, 16Jan 09, 18SHIN-ETSU CHEMICAL CO., LTD.
9864269 Photomask blankAug 17, 16Jan 09, 18SHIN-ETSU CHEMICAL CO., LTD.
9857679 Lithography mask and fabricating the sameAug 21, 15Jan 02, 18TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.

Showing 1 to 20 of 123 results