G01Q 10/02

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Patent/Pub #TitleFiling DateIssue/Publication DatePatent Owner
9995763 Precise probe placement in automated scanning probe microscopy systemsFeb 24, 15Jun 12, 18Bruker Nano, Inc.
9841436 AM/FM measurements using multiple frequency of atomic force microscopySep 26, 16Dec 12, 17OXFORD INSTRUMENTS ASYLUM RESEARCH, INC
9709598 Scanning ion conductance microscopy using surface roughness for probe movementMay 27, 16Jul 18, 17IMPERIAL INNOVATIONS LIMITED
9506947 System and method for non-contact microscopy for three-dimensional pre-characterization of a sample for fast and non-destructive on sample navigation during nanoprobingNov 24, 14Nov 29, 16DCG SYSTEMS, INC.
9052340 Probe assembly for a scanning probe microscopeMar 29, 11Jun 09, 15INFINITESIMA LIMITED
8402561 MEMS actuator device with integrated temperature sensorsOct 15, 09Mar 19, 13ADHAWK MICROSYSTEMS INC.
8397311 Metrology probe and method of configuring a metrology probeMay 28, 10Mar 12, 13THE RESEARCH FOUNDATION FOR THE STATE UNIVERSITY OF NEW YORK
8160848 Apparatus for generating coarse-grained simulation image of sample to be measured with a probe of a scanning probe microscopeMar 29, 07Apr 17, 12MIZUHO INFORMATION & RESEARCH INSTITUTE, INC., WASEDA UNIVERSITY,