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| 9966232 | Ultra-high speed anisotropic reactive ion etching | Dec 09, 15 | May 08, 18 | The Penn State Research Foundation |
| 9958830 | Functional micromechanical assembly | Jul 17, 12 | May 01, 18 | The Swatch Group Research and Development Ltd. |
| 9956720 | Methods and systems for fast imprinting of nanometer scale features in a workpiece | Sep 27, 13 | May 01, 18 | North Carolina State University |
| 9950925 | Method for forming functional part in minute space | Jul 06, 17 | Apr 24, 18 | NAPRA CO. LTD. |
| 9939476 | Capacitance measurement | Sep 25, 15 | Apr 10, 18 | Analog Devices Global |
| 9929053 | Systems and methods for controlling release of transferable semiconductor structures | Nov 20, 15 | Mar 27, 18 | X-CELEPRINT LIMITED |
| 9921006 | Systems and methods of manufacturing microchannel arrays | Mar 12, 14 | Mar 20, 18 | OREGON STATE UNIVERSITY |
| 9915679 | Method of detecting whether microelectromechanical system device is hermetic | Apr 08, 16 | Mar 13, 18 | SENSORTEK TECHNOLOGY CORP. |
| 9908274 | System and method for extruding parts having microstructures | Jul 28, 15 | Mar 06, 18 | HOOWAKI, LLC |
| 9902932 | Methods, apparatus, and systems for fabrication of polymeric nano- and micro-fibers in aligned configurations | Apr 10, 15 | Feb 27, 18 | CARNEGIE MELLON UNIVERSITY |
| 9895902 | Compliant micro device transfer head | Sep 28, 16 | Feb 20, 18 | APPLE INC. |
| 9891006 | Metal-based microchannel heat exchangers made by molding replication and assembly | Jan 29, 16 | Feb 13, 18 | BOARD OF SUPERVISORS OF LOUISIANA STATE UNIVERSITY AND AGRICULTURAL AND MECHANICAL COLLEGE |
| 9884759 | Thermoelement including a three-dimensional microstructure, and method for producing a thermoelement | Sep 20, 10 | Feb 06, 18 | SIEMENS AKTIENGESELLSCHAFT |
| 9877920 | Methods for fabricating isolated micro- or nano-structures using soft or imprint lithography | Mar 16, 15 | Jan 30, 18 | THE UNIVERSITY OF NORTH CAROLINA AT CHAPEL HILL |
| 9868634 | Method for manufacturing stamp and method for manufacturing wire grid polarizer using the stamp | Apr 09, 15 | Jan 16, 18 | SAMSUNG DISPLAY CO., LTD. |
| 9869551 | Inertial angular sensor of balanced MEMS type and method for balancing such a sensor | Dec 03, 12 | Jan 16, 18 | SAGEM DEFENSE SECURITE |
| 9856140 | Substrate plate for MEMS devices | Oct 10, 14 | Jan 02, 18 | OCE-TECHNOLOGIES B.V. |
| 9834438 | Compensation and calibration for MEMS devices | Nov 20, 15 | Dec 05, 17 | NXP USA, INC. |
| 9828244 | Compliant electrostatic transfer head with defined cavity | Sep 30, 14 | Nov 28, 17 | APPLE INC. |