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| 9980038 | Top port multi-part surface mount silicon condenser microphone | May 26, 17 | May 22, 18 | Knowles Electronics, LLC |
| 9956722 | Method and device for thermocompression bonding | Apr 04, 14 | May 01, 18 | STRATEC Consumables GmbH |
| 9950922 | Packaged microsystems | Mar 17, 15 | Apr 24, 18 | The Regents of the University of Michigan |
| 9927712 | Spatial light modulation element module, photolithographing apparatus, exposure apparatus, method of manufacturing spatial light modulation element module and method of manufacturing device | May 16, 16 | Mar 27, 18 | Nikon Corporation |
| 9926188 | Sensor unit including a decoupling structure and manufacturing method therefor | Feb 05, 15 | Mar 27, 18 | 502 Robert Bosch GmbH |
| 9919522 | MEMS device, liquid ejecting head, liquid ejecting apparatus, manufacturing method of MEMS device, and manufacturing method of liquid ejecting head | Sep 07, 16 | Mar 20, 18 | SEIKO EPSON CORPORATION |
| 9911713 | Method for applying a bonding layer | Feb 24, 17 | Mar 06, 18 | EV GROUP E. THALLNER GMBH |
| 9902613 | Positioning method in microprocessing process of bulk silicon | Aug 19, 15 | Feb 27, 18 | CSMC TECHNOLOGIES FAB1 CO., LTD. |
| 9891244 | Microelectronic packages having split gyroscope structures and methods for the fabrication thereof | Aug 15, 14 | Feb 13, 18 | NXP USA, INC. |
| 9878904 | MEMS sensor with electronics integration | Oct 25, 16 | Jan 30, 18 | Rosemount Aerospace Inc. |
| 9868630 | Package structure and manufacturing method thereof | Aug 16, 16 | Jan 16, 18 | TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD. |
| 9862592 | MEMS transducer and method for manufacturing the same | Mar 13, 15 | Jan 09, 18 | TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD. |
| 9842749 | Plasma assisted method of accurate alignment and pre-bonding for microstructure including glass or quartz chip | Nov 17, 15 | Dec 12, 17 | BEIJING UNIVERSITY OF TECHNOLOGY |
| 9835801 | Edge construction on optical devices | Sep 22, 16 | Dec 05, 17 | MELLANOX TECHNOLOGIES SILICON PHOTONICS INC. |
| 9782772 | Method of bonding two surfaces and construct therefrom and microfluidic device containing the construct | Nov 02, 15 | Oct 10, 17 | SAMSUNG ELECTRONICS CO., LTD. |
| 9764946 | MEMs device with outgassing shield | Oct 24, 13 | Sep 19, 17 | ANALOG DEVICES, INC. |
| 9751752 | Method of fabrication of Al/Ge bonding in a wafer packaging environment and a product produced therefrom | Nov 30, 16 | Sep 05, 17 | INVENSENSE, INC. |
| 9731958 | Microelectromechanical system and fabricating process having decoupling structure that includes attaching element for fastening to carrier | Sep 22, 16 | Aug 15, 17 | THALES |
| 9718668 | Method of fabricating a nanochannel system for DNA sequencing and nanoparticle characterization | Jul 26, 13 | Aug 01, 17 | BOARD OF TRUSTEES OF THE UNIVERSITY OF ARKANSAS |