| 9891125 | Electronic device, physical quantity sensor, pressure sensor, vibrator, altimeter, electronic apparatus, and moving object | Nov 25, 15 | Feb 13, 18 | SEIKO EPSON CORPORATION |
| 9884759 | Thermoelement including a three-dimensional microstructure, and method for producing a thermoelement | Sep 20, 10 | Feb 06, 18 | SIEMENS AKTIENGESELLSCHAFT |
| 9868631 | Systems and methods for MEMS-based cross-point electrical switching | Sep 16, 13 | Jan 16, 18 | CIENA CORPORATION |
| 9695039 | Multi-pressure MEMS package | May 02, 16 | Jul 04, 17 | TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD. |
| 9670059 | Sensor structure for sensing pressure waves and ambient pressure | Mar 23, 16 | Jun 06, 17 | INFINEON TECHNOLOGIES AG |
| 9659717 | MEMS device with constant capacitance | Feb 18, 14 | May 23, 17 | ANALOG DEVICES GLOBAL |
| 9617143 | Semiconductor device | Dec 30, 14 | Apr 11, 17 | TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD. |
| 9604842 | System for driving an array of MEMS structures and corresponding driving method | Mar 31, 15 | Mar 28, 17 | STMICROELECTRONICS S.R.L. |
| 9604843 | MEMS devices and methods for forming same | Jun 10, 15 | Mar 28, 17 | TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD. |
| 9604844 | Sequential wafer bonding | Jul 20, 15 | Mar 28, 17 | NXP USA, INC. |
| 9512466 | Microdroplet formation by wells in a microfluidic device | Mar 17, 15 | Dec 06, 16 | SANTA CLARA UNIVERSITY |
| 9260296 | MEMS integrated pressure sensor devices and methods of forming same | May 15, 15 | Feb 16, 16 | TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD. |
| 9069139 | Multicast optical switch | Jul 26, 12 | Jun 30, 15 | LUMENTUM OPERATIONS LLC |
| 9035307 | Microphone component | Dec 27, 13 | May 19, 15 | ROBERT BOSCH GMBH |
| 9029961 | Wafer level method of sealing different pressure levels for MEMS sensors | Aug 29, 13 | May 12, 15 | TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD. |
| 9030650 | Laser rangefinder | Jul 06, 11 | May 12, 15 | HON HAI PRECISION INDUSTRY CO., LTD. |
| 9002160 | Optical switch having a multirow waveguide array | Jul 26, 12 | Apr 07, 15 | LUMENTUM OPERATIONS LLC |
| 8945688 | Process of forming a material having nano-particles and a material having nano-particles | Jan 03, 11 | Feb 03, 15 | GENERAL ELECTRIC COMPANY |
| 8941152 | Semiconductor device | Dec 13, 13 | Jan 27, 15 | TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD. |
| 8861218 | Device containing plurality of smaller MEMS devices in place of a larger MEMS device | Nov 09, 09 | Oct 14, 14 | CAVENDISH KINETICS, INC. |