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| 9981841 | MEMS integrated pressure sensor and microphone devices and methods of forming same | May 15, 17 | May 29, 18 | Taiwan Semiconductor Manufacturing Company, Ltd. |
| 9983403 | Device and method for micro-electro-mechanical-system photonic switch | Oct 03, 14 | May 29, 18 | HUAWEI TECHNOLOGIES CO., LTD. |
| 9981267 | Paired laser and electrokinetic separation, manipulation, and analysis device | Jun 15, 16 | May 29, 18 | The Goverment of the United States of America as represented by the Secretary of the Navy |
| 9979433 | RF front-end circuitry with transistor and microelectromechanical multiple throw switches | Aug 28, 13 | May 22, 18 | Qorvo US, Inc. |
| 9969614 | MEMS packages and methods of manufacture thereof | May 29, 15 | May 15, 18 | Taiwan Semiconductor Manufacturing Company, Ltd. |
| 9967679 | System and method for an integrated transducer and temperature sensor | Feb 03, 15 | May 08, 18 | Infineon Technologies AG |
| 9950922 | Packaged microsystems | Mar 17, 15 | Apr 24, 18 | The Regents of the University of Michigan |
| 9948212 | Method and technique to control MEMS DVC control waveform for lifetime enhancement | May 16, 14 | Apr 17, 18 | CAVENDISH KINETICS INC. |
| 9942629 | Methods of sensing parameters | Aug 07, 15 | Apr 10, 18 | Not available |
| 9935675 | RF front-end circuitry with transistor and microelectromechanical multiple throw switches | Aug 28, 13 | Apr 03, 18 | Qorvo US, Inc. |
| 9935600 | Switchable filters and design structures | Nov 13, 15 | Apr 03, 18 | IBM Corporation |
| 9919914 | MEMS devices including MEMS dies and connectors thereto | May 20, 16 | Mar 20, 18 | TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD. |
| 9915831 | Adaptive optical filter for spectacle lenses | Sep 26, 14 | Mar 13, 18 | VALEO VISION |
| 9914640 | Targeted control of the absorption behavior during laser resealing | Nov 22, 16 | Mar 13, 18 | ROBERT BOSCH GMBH |
| 9912257 | Methods and systems for micro machines | Oct 10, 14 | Mar 06, 18 | MicroZeus, LLC |
| 9908771 | Inertial and pressure sensors on single chip | Oct 02, 14 | Mar 06, 18 | ROBERT BOSCH GMBH |
| 9903884 | Parallel plate capacitor and acceleration sensor comprising same | Aug 30, 13 | Feb 27, 18 | CSMC TECHNOLOGIES FAB1 CO., LTD. |
| 9897460 | Method and system for quadrature error compensation | Jun 08, 15 | Feb 20, 18 | MAXIM INTEGRATED PRODUCTS, INC. |
| 9890040 | Stress compensation for piezoelectric optical MEMS devices | Nov 05, 14 | Feb 13, 18 | TEXAS INSTRUMENTS INCORPORATED |