| RE49987 | Multiple plated via arrays of different wire heights on a same substrate | Apr 20, 22 | May 28, 24 | Invensas LLC |
| 9994440 | MEMS device and process | Jun 30, 14 | Jun 12, 18 | Cirrus Logic, Inc. |
| 9998812 | Surface mountable microphone package, a microphone arrangement, a mobile phone and a method for recording microphone signals | Feb 15, 16 | Jun 12, 18 | Infineon Technologies AG |
| 9994441 | Optical electronic device and method of fabrication | Oct 31, 16 | Jun 12, 18 | Agilent Technologies Texas Instruments Incorporated |
| 9988261 | Micromechanical device and method for manufacturing a micromechanical device | Jun 13, 13 | Jun 05, 18 | 502 Robert Bosch GmbH |
| 9988265 | Trapped sacrificial structures and methods of manufacturing same using thin-film encapsulation | Aug 22, 16 | Jun 05, 18 | Semiconductor Manufacturing International (Shanghai) Corporation |
| 9991251 | Semiconductor device | Jun 02, 17 | Jun 05, 18 | Murata Manufacturing Co., Ltd. |
| 9983403 | Device and method for micro-electro-mechanical-system photonic switch | Oct 03, 14 | May 29, 18 | HUAWEI TECHNOLOGIES CO., LTD. |
| 9975757 | Wafer Level Hermetic Seal Process for microelectromechanical systems (MEMS) devices | Jun 03, 15 | May 22, 18 | Taiwan Semiconductor Manufacturing Co Ltd. |
| 9975762 | Stacked semiconductor structure and method of forming the same | Jun 12, 13 | May 22, 18 | Taiwan Semiconductor Manufacturing Company, Ltd. |
| 9975758 | Wafer processing equipment having exposable sensing layers | Jul 13, 17 | May 22, 18 | Applied Materials Inc. |
| 9980052 | MEMS-microphone with reduced parasitic capacitance | Nov 14, 11 | May 22, 18 | 501 TDK Corporation |
| 9975760 | MEMS sensor device package housing with an embedded controllable device | Jun 28, 16 | May 22, 18 | Robert Bosch GmbH |
| 9975763 | Integration of AIN ultrasonic transducer on a CMOS substrate using fusion bonding process | Mar 13, 17 | May 22, 18 | Invensense, Inc. |
| 9975756 | Micro-electro-mechanical pressure device and methods of forming same | Sep 26, 16 | May 22, 18 | SMI STMicroelectronics S.r.l |
| 9980038 | Top port multi-part surface mount silicon condenser microphone | May 26, 17 | May 22, 18 | Knowles Electronics, LLC |
| 9975759 | Method and structure of MEMS PLCSP fabrication | Jul 11, 17 | May 22, 18 | MCube Inc. |
| 9969610 | Wafer level MEMS package including dual seal ring | Jan 26, 17 | May 15, 18 | Raytheon Company |
| 9969611 | Structure for controlling flashover in MEMS devices | Dec 01, 17 | May 15, 18 | Eagle Technology, LLC |
| 9969609 | MEMS device | Oct 18, 16 | May 15, 18 | Semiconductor Manufacturing International ( Shanghai) Corporation |