| 9994440 | MEMS device and process | Jun 30, 14 | Jun 12, 18 | Cirrus Logic, Inc. |
| 9994439 | Pressure sensor, manufacturing method of pressure sensor, altimeter, electronic apparatus, and moving object | Jan 27, 17 | Jun 12, 18 | Seiko Epson Corporation |
| 9994441 | Optical electronic device and method of fabrication | Oct 31, 16 | Jun 12, 18 | Agilent Technologies Texas Instruments Incorporated |
| 9991340 | Mechanical stress-decoupling in semiconductor device | Apr 25, 17 | Jun 05, 18 | Infineon Technologies AG |
| 9988260 | Rough MEMS surface | Apr 29, 16 | Jun 05, 18 | NXP USA, Inc. |
| 9991822 | MEMS component and method for the production thereof | Aug 01, 13 | Jun 05, 18 | TDK Corporation |
| 9988261 | Micromechanical device and method for manufacturing a micromechanical device | Jun 13, 13 | Jun 05, 18 | 502 Robert Bosch GmbH |
| 9988265 | Trapped sacrificial structures and methods of manufacturing same using thin-film encapsulation | Aug 22, 16 | Jun 05, 18 | Semiconductor Manufacturing International (Shanghai) Corporation |
| 9983401 | MEMS device | May 16, 16 | May 29, 18 | Intel Corp. |
| 9981842 | Micro-Electro-Mechanical System (MEMS) structures and design structures | May 24, 16 | May 29, 18 | IBM Corporation |
| 9986344 | MEMS microphone with low pressure region between diaphragm and counter electrode | Nov 06, 15 | May 29, 18 | Infineon Technologies AG |
| 9975755 | Membrane of amorphous carbon and MEMS including such a membrane | Mar 10, 17 | May 22, 18 | Commissariat à l'énergie atomique et aux énergies alternatives |
| 9975754 | Semiconductor structure and manufacturing method thereof | Apr 26, 17 | May 22, 18 | Taiwan Semiconductor Manufacturing Company Ltd. |
| 9980051 | MEMS loudspeaker having an actuator structure and a diaphragm spaced apart therefrom | May 13, 15 | May 22, 18 | USOUND GMBH |
| 9975756 | Micro-electro-mechanical pressure device and methods of forming same | Sep 26, 16 | May 22, 18 | SMI STMicroelectronics S.r.l |
| 9980038 | Top port multi-part surface mount silicon condenser microphone | May 26, 17 | May 22, 18 | Knowles Electronics, LLC |
| 9975759 | Method and structure of MEMS PLCSP fabrication | Jul 11, 17 | May 22, 18 | MCube Inc. |
| 9969613 | Method for forming micro-electro-mechanical system (MEMS) beam structure | Apr 12, 13 | May 15, 18 | IBM Corporation |
| 9971152 | Projector and head-up display device | Nov 07, 16 | May 15, 18 | FUNAI ELECTRIC CO., LTD. |
| 9972583 | Durable, heat-resistant multi-layer coatings and coated articles | Aug 05, 13 | May 15, 18 | SPTS TECHNOLOGIES LIMITED |