Class H01S : DEVICES USING STIMULATED EMISSION
Subclass 3/038: Lasers, i.e. devices for generation, amplification, modulation, demodulation, or frequency-changing, using stimulated emission, of infra-red, visible, or ultra-violet waves (semiconductor lasers H01S 5/00) Constructional details of gas laser discharge tubes Electrodes, e.g. special shape, configuration or composition
| Patent # | Title | Filing Date | Issue Date | Patent Owner |
|---|---|---|---|---|
| 12244117 | High-voltage pulse generator, gas laser apparatus, and method for manufacturing electronic device | Aug 09, 21 | Mar 04, 25 | National University Corporation Nagaoka University of Technology; Gigaphoton Inc.; |
| 12245409 | Electromagnetic shield for a sealing mechanism of a laser chamber | Aug 27, 21 | Mar 04, 25 | Cymer, LLC |
| 12191623 | Light emitting sealed body and light source device | Nov 27, 23 | Jan 07, 25 | Hamamatsu Photonics K.K.; ENERGETIQ TECHNOLOGY, INC.; |
| 12132289 | Copper electrode material | Jan 06, 20 | Oct 29, 24 | JX Advanced Metals Corporation |
| 12117165 | Plasma heating apparatus, system and method | Aug 11, 21 | Oct 15, 24 | Aureon Energy Ltd. |
| 12113326 | Laser device and electronic device manufacturing method | Aug 05, 22 | Oct 08, 24 | Gigaphoton Inc. |
| 12072507 | Laser radiation system | Apr 22, 20 | Aug 27, 24 | Gigaphoton Inc.; Kyushu University, National University Corporation; |
| 11987871 | Electrodes for laser chambers having extended lifetime | May 02, 17 | May 21, 24 | Cymer, LLC |
| 11978997 | Laser apparatus and electronic device manufacturing method | Aug 10, 21 | May 07, 24 | Gigaphoton Inc. |
| 11909163 | Radio frequency laser | Nov 02, 23 | Feb 20, 24 | Jilin Yongli Laser Technology Co., Ltd. |
| 11876336 | Positive high-voltage laser having super-long discharge tube | Aug 29, 22 | Jan 16, 24 | Chengdu Weeson Tech Co., Ltd. |
| 11862922 | Light emitting sealed body and light source device | Dec 21, 20 | Jan 02, 24 | ENERGETIQ TECHNOLOGY, INC.; Hamamatsu Photonics K. K.; |
| 11848530 | Radio-frequency excited gas laser | Jan 28, 21 | Dec 19, 23 | Coherent, Inc. |
| 11777271 | Method of and apparatus for extending electrode life in a laser chamber | Oct 09, 18 | Oct 03, 23 | Cymer, LLC |
| 11749520 | Electrode for a discharge chamber | Aug 25, 21 | Sep 05, 23 | Cymer, LLC |
| 11734810 | Laser system, learning device, and inference device | Jul 15, 20 | Aug 22, 23 | Mitsubishi Electric Corporation |
| 11588291 | Laser chamber apparatus, gas laser apparatus, and method for manufacturing electronic device | Jul 09, 21 | Feb 21, 23 | Gigaphoton Inc. |
| 11545807 | Compact coaxial laser | Jan 29, 19 | Jan 03, 23 | IDEA MACHINE DEVELOPMENT DESIGN AND PRODUCTION LTD. |
| 11381051 | Wavelength flexibility through variable-period poling of optical fiber | Jul 06, 20 | Jul 05, 22 | The Government of the United States of America, as represented by the Secretary of the Air Force |
| 11374376 | Wavelength flexibility through variable-period poling of a compact cylindrical optical fiber assembly | Aug 06, 20 | Jun 28, 22 | The Government of the United States of America, as represented by the Secretary of the Air Force |
| Publication # | Title | Filing Date | Pub Date | Patent Owner |
|---|---|---|---|---|
| 2025/0112,433 | LASER OSCILLATOR | Sep 24, 24 | Apr 03, 25 | Not available |
| 2025/0096,515 | CHAMBER FOR GAS LASER DEVICE, GAS LASER DEVICE, AND ELECTRONIC DEVICE MANUFACTURING METHOD | Dec 04, 24 | Mar 20, 25 | Gigaphoton Inc. |
| 2025/0038,469 | DISCHARGE ELECTRODES, MANUFACTURING METHOD OF ANODE, AND ELECTRONIC DEVICE MANUFACTURING METHOD | Oct 10, 24 | Jan 30, 25 | Gigaphoton Inc. |
| 2024/0405,496 | CHAMBER FOR GAS LASER DEVICE, GAS LASER DEVICE, AND ELECTRONIC DEVICE MANUFACTURING METHOD | Aug 09, 24 | Dec 05, 24 | Gigaphoton Inc. |
| 2024/0405,497 | CHAMBER OF GAS LASER APPARATUS AND ELECTRONIC DEVICE MANUFACTURING METHOD | Aug 09, 24 | Dec 05, 24 | Gigaphoton Inc. |
| 2024/0396,281 | Absorbing Optical Switch for High Fluence Laser Pulse | May 24, 24 | Nov 28, 24 | Innoven Energy LLC |
| 2024/0396,282 | DISCHARGE ELECTRODE, METHOD OF MANUFACTURING DISCHARGE ELECTRODE, AND ELECTRONIC DEVICE MANUFACTURING METHOD | Aug 07, 24 | Nov 28, 24 | Gigaphoton Inc. |
| 2024/0339,797 | GAS LASER DEVICE AND ELECTRONIC DEVICE MANUFACTURING METHOD | Jun 18, 24 | Oct 10, 24 | Gigaphoton Inc. |
| 2024/0154,381 | GAS LASER APPARATUS, GAS LASER APPARATUS MAINTENANCE METHOD, AND ELECTRONIC DEVICE MANUFACTURING METHOD | Jan 10, 24 | May 09, 24 | Gigaphoton Inc. |
| 2024/0146,011 | GAS LASER DEVICE AND ELECTRONIC DEVICE MANUFACTURING METHOD | Jan 10, 24 | May 02, 24 | Gigaphoton Inc. |
| 2023/0275,386 | DISCHARGE ELECTRODE, METHOD FOR MANUFACTURING ANODE, AND METHOD FOR MANUFACTURING ELECTRONIC DEVICES | May 04, 23 | Aug 31, 23 | Gigaphoton Inc. |
| 2023/0016,894 | UNDERCUT ELECTRODES FOR A GAS DISCHARGE LASER CHAMBER | Dec 10, 20 | Jan 19, 23 | Not available |
| 2022/0173,565 | Wavelength flexibility through variable-period poling of a compact cylindrical optical fiber assembly | Feb 15, 22 | Jun 02, 22 | Not available |
| 2021/0288,459 | LASER SYSTEM AND ELECTRONIC DEVICE MANUFACTURING METHOD | Jun 03, 21 | Sep 16, 21 | Gigaphoton Inc. |
| 2021/0257,797 | PROLONGED LIFE LASER CHAMBER ELECTRODE AND LASER HAVING SAME | Aug 28, 19 | Aug 19, 21 | Not available |
| 2021/0057,864 | ENHANCED WAVEGUIDE SURFACE IN GAS LASERS | Aug 06, 20 | Feb 25, 21 | Not available |
| 2019/0252,846 | HIGH-VOLTAGE PULSE GENERATOR AND GAS LASER APPARATUS | Apr 26, 19 | Aug 15, 19 | National University Corporation Nagaoka University of Technology; Gigaphoton Inc.; |
| 2018/0301,862 | LASER MACHINING DEVICE | Apr 03, 18 | Oct 18, 18 | FANUC CORPORATION |
| 2018/0006,425 | ONLINE CALIBRATION FOR REPETITION RATE DEPENDENT PERFORMANCE VARIABLES | Sep 11, 17 | Jan 04, 18 | ASML NETHERLANDS B.V., CYMER, LLC, |
| 2017/0338,618 | HIGH-VOLTAGE PULSE GENERATOR AND GAS LASER APPARATUS | Aug 08, 17 | Nov 23, 17 | GIGAPHOTON INC., NATIONAL UNIVERSITY CORPORATION NAGAOKA UNIVERSITY OF TECHNOLOGY, |
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