H01S 3/036

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Class  H01S : DEVICES USING STIMULATED EMISSION


Subclass 3/036: Lasers, i.e. devices for generation, amplification, modulation, demodulation, or frequency-changing, using stimulated emission, of infra-red, visible, or ultra-violet waves (semiconductor lasers H01S 5/00) Constructional details of gas laser discharge tubes Means for obtaining or maintaining the desired gas pressure within the tube, e.g. by gettering, replenishing; Means for circulating the gas, e.g. for equalising the pressure within the tube (cooling arrangements for gas lasers H01S 3/041; gas dynamic lasers H01S 3/0979)

Recent Patents

Patent #TitleFiling DateIssue DatePatent Owner
12253806 Gas purge systems for a laser sourceDec 08, 20Mar 18, 25Cymer, LLC
12160080 Excimer laser system with long service intervalsJan 07, 20Dec 03, 24STRATA SKIN SCIENCES, INC.
12125695 Reducing fretting corrosion in a gas discharge chamber support deviceJan 26, 21Oct 22, 24Cymer, LLC
12113326 Laser device and electronic device manufacturing methodAug 05, 22Oct 08, 24Gigaphoton Inc.
11988966 Gas monitoring systemMay 16, 19May 21, 24Cymer, LLC
11947263 Laser chamber and electronic device manufacturing methodDec 03, 21Apr 02, 24Gigaphoton Inc.
11949202 Gas management systemFeb 15, 18Apr 02, 24Cymer, LLC
11949203 Gas management systemJan 10, 19Apr 02, 24Cymer, LLC
11754541 Fluorine detection in a gas discharge light sourceSep 10, 18Sep 12, 23Cymer, LLC
11734810 Laser system, learning device, and inference deviceJul 15, 20Aug 22, 23Mitsubishi Electric Corporation
11581692 Controlling pressure in a cavity of a light sourceDec 18, 19Feb 14, 23KLA Corp.
11451003 Laser gas regenerating apparatus and electronic device manufacturing methodSep 01, 20Sep 20, 22Gigaphoton Inc.
11271361 Excimer laser apparatus and method for manufacturing electronic deviceApr 15, 20Mar 08, 22Gigaphoton Inc.
11239625 Laser apparatus including gas supply device and exhausting deviceOct 03, 18Feb 01, 22Gigaphoton Inc.
11162530 Gas laser apparatus and magnetic bearing control methodSep 12, 19Nov 02, 21Gigaphoton Inc.
11050210 Capacitor cooling structure and laser apparatusDec 30, 19Jun 29, 21Gigaphoton Inc.
11050213 Online calibration for repetition rate dependent performance variablesJun 24, 20Jun 29, 21Cymer, LLC; ASML Netherlands B.V.;
10971883 Gas laser apparatusNov 01, 18Apr 06, 21Gigaphoton Inc.
10971886 Laser apparatusFeb 04, 19Apr 06, 21Gigaphoton Inc.
10965085 Laser chamber with metal damper memberJan 08, 18Mar 30, 21Gigaphoton Inc.

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Recent Publications

Publication #TitleFiling DatePub DatePatent Owner
2024/0297,474 SHUTTER APPARATUS HAVING PORTS TO CONTROL ENERGY BEAM AND GAS TRANSFER BETWEEN ZONESFeb 29, 24Sep 05, 24Not available
2024/0291,226 GAS CONTROL APPARATUS FOR GAS DISCHARGE STAGEJun 02, 22Aug 29, 24Not available
2024/0235,144 Dustproof structure for laser output window of laser, and laserMar 13, 24Jul 11, 24BEIJING RSLASER OPTO-ELECTRONICS TECHNOLOGY CO., LTD.
2024/0146,011 GAS LASER DEVICE AND ELECTRONIC DEVICE MANUFACTURING METHODJan 10, 24May 02, 24Gigaphoton Inc.
2024/0128,705 GAS LASER AMPLIFIER, GAS LASER APPARATUS, EUV LIGHT GENERATION APPARATUS, AND EUV EXPOSURE APPARATUSNov 11, 19Apr 18, 24Mitsubishi Electric Corporation
2024/0120,700 CO2 BEAM SOURCE COMPRISING A CATALYSTDec 18, 23Apr 11, 24Not available
2024/0035,514 BEARING APPARATUS AND LASER APPARATUS COMPRISING BEARING APPARATUSJul 24, 23Feb 01, 24Not available
2024/0039,228 REDUCING ENERGY CONSUMPTION OF A GAS DISCHARGE CHAMBER BLOWERDec 09, 21Feb 01, 24Not available
2023/0387,642 CHAMBER DEVICE, GAS LASER DEVICE, AND ELECTRONIC DEVICE MANUFACTURING METHODAug 10, 23Nov 30, 23Gigaphoton Inc.
2023/0163,551 CONDUIT SYSTEM, RADIATION SOURCE, LITHOGRAPHIC APPARATUS, AND METHODS THEREOFMar 09, 21May 25, 23Not available
2022/0385,022 LINE NARROWING GAS LASER DEVICE, CONTROL METHOD THEREOF, AND ELECTRONIC DEVICE MANUFACTURING METHODAug 08, 22Dec 01, 22Gigaphoton Inc.
2022/0385,031 CONTROLLING A SPECTRAL PROPERTY OF AN OUTPUT LIGHT BEAM PRODUCED BY AN OPTICAL SOURCEOct 16, 20Dec 01, 22Not available
2022/0285,902 GAS CONTROL METHOD AND RELATED USESSep 10, 20Sep 08, 22Not available
2022/0255,286 CONTROL SYSTEM FOR A PLURALITY OF DEEP ULTRAVIOLET OPTICAL OSCILLATORSMay 15, 20Aug 11, 22Not available
2021/0367,390 GAS LASER APPARATUS, AND ELECTRONIC DEVICE MANUFACTURING METHODAug 10, 21Nov 25, 21Gigaphoton Inc.
2021/0336,403 GAS LASER APPARATUS, LASER BEAM EMITTING METHOD OF GAS LASER APPARATUS, AND ELECTRONIC DEVICE MANUFACTURING METHODJul 09, 21Oct 28, 21Gigaphoton Inc.
2021/0057,864 ENHANCED WAVEGUIDE SURFACE IN GAS LASERSAug 06, 20Feb 25, 21Not available
2020/0403,371 LASER GAS REGENERATING APPARATUS AND ELECTRONIC DEVICE MANUFACTURING METHODSep 01, 20Dec 24, 20Gigaphoton Inc.
2020/0358,240 GAS MANAGEMENT SYSTEMFeb 15, 18Nov 12, 20Not available
2020/0358,241 GAS MANAGEMENT SYSTEMJan 10, 19Nov 12, 20Not available

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Patents Issued To Date - By Filing Year

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