12224549 | Line narrowing module, gas laser apparatus, and method for manufacturing electronic devices | Feb 10, 23 | Feb 11, 25 | Gigaphoton Inc. |
12191623 | Light emitting sealed body and light source device | Nov 27, 23 | Jan 07, 25 | Hamamatsu Photonics K.K.; ENERGETIQ TECHNOLOGY, INC.; |
12155168 | Line narrowing gas laser device and electronic device manufacturing method | Feb 02, 23 | Nov 26, 24 | Gigaphoton Inc. |
12072507 | Laser radiation system | Apr 22, 20 | Aug 27, 24 | Gigaphoton Inc.; Kyushu University, National University Corporation; |
12027810 | Solid-state lasers and assembly method therefor | Aug 04, 20 | Jul 02, 24 | MENHIR PHOTONICS AG |
11942753 | Folded slab laser | Sep 18, 20 | Mar 26, 24 | Kern Technologies, LLC. |
11862922 | Light emitting sealed body and light source device | Dec 21, 20 | Jan 02, 24 | ENERGETIQ TECHNOLOGY, INC.; Hamamatsu Photonics K. K.; |
11860365 | Modeling thermal effects for a laser system | Apr 02, 21 | Jan 02, 24 | Microsoft Technology Licensing, LLC. |
11855406 | Gaseous laser systems with edge-defining element and related techniques | Mar 31, 22 | Dec 26, 23 | XEMED LLC |
11784452 | Optical element for a deep ultraviolet light source | Feb 05, 20 | Oct 10, 23 | Cymer, LLC |
11734810 | Laser system, learning device, and inference device | Jul 15, 20 | Aug 22, 23 | Mitsubishi Electric Corporation |
11588291 | Laser chamber apparatus, gas laser apparatus, and method for manufacturing electronic device | Jul 09, 21 | Feb 21, 23 | Gigaphoton Inc. |
11476641 | Window for laser protection | Jun 22, 20 | Oct 18, 22 | MAC THIN FILMS, INC. |
11476630 | Thin film brewster coupling device | Jun 01, 21 | Oct 18, 22 | Not available |
11411364 | Line narrowing module, gas laser apparatus, and electronic device manufacturing method | Jul 09, 21 | Aug 09, 22 | Gigaphoton Inc. |
11367989 | Light emitting unit and light source device | Dec 21, 20 | Jun 21, 22 | Hamamatsu Photonics K.K.; ENERGETIQ TECHNOLOGY, INC.; |
11367988 | Gas laser device | May 17, 19 | Jun 21, 22 | Mitsubishi Electric Corporation |
11349272 | Laser chamber, method for manufacturing seal member, and method for manufacturing electronic device | Aug 31, 20 | May 31, 22 | Gigaphoton Inc. |
11329443 | Laser device | Mar 04, 20 | May 10, 22 | Panasonic Intellectual Property Management Co., Ltd. |
11264771 | Laser device | May 09, 19 | Mar 01, 22 | Mitsubishi Electric Corporation |