G03F 1/26

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Description

Class  G03F : PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR


Subclass 1/26: Originals for photomechanical production of textured or patterned surfaces, e.g. masks, photo-masks or reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof Phase shift masks [PSM]; PSM blanks; Preparation thereof

Recent Patents

Patent #TitleFiling DateIssue DatePatent Owner
12265324 Agglutinant for pellicle, pellicle, exposure original plate with pellicle, method for producing semiconductor device, method for producing liquid crystal display board, method for regenerating exposure original plate, and peeling residue reduction methodApr 15, 20Apr 01, 25Shin-Etsu Chemical Co. Ltd.
12228852 Reflective mask blank, reflective mask and method for manufacturing a semiconductor deviceDec 04, 23Feb 18, 25501 Hoya Corporation
12222640 Reflective mask blank, reflective mask, method of manufacturing reflective mask blank, and method of manufacturing reflective maskOct 20, 23Feb 11, 25AGC Inc.
12197120 Patterning device and method of use thereofJan 02, 20Jan 14, 25ASML NETHERLANDS B.V.
12197125 Mask and reticle protection with atomic layer deposition (ALD)Dec 22, 20Jan 14, 25Nano-Master, Inc.
12135496 Reflective mask blank and reflective maskDec 01, 23Nov 05, 24501 Hoya Corporation
12108134 Methods for manufacturing phase masks and lens-less camera moduleFeb 14, 23Oct 01, 24Not available
12099293 Phase shift mask for extreme ultraviolet lithography and a method of manufacturing a semiconductor device using the sameMay 24, 21Sep 24, 24Samsung Electronics Co. Ltd.
12070736 Pre-concentrator with aligned three-dimensional porous structure and method of manufacturing the sameFeb 19, 19Aug 27, 24Korea Advanced Institute of Science and Technology
12066757 Mask and method of forming the sameApr 27, 23Aug 20, 24Taiwan Semiconductor Manufacturing Company Ltd.
12032280 Reflective mask blank, reflective mask, and method for manufacturing reflective maskDec 19, 23Jul 09, 24AGC INC.
12013631 Mask blank, transfer mask, and method for manufacturing semiconductor deviceDec 02, 22Jun 18, 24501 Hoya Corporation
12013634 Reduction or elimination of pattern placement error in metrology measurementsDec 06, 22Jun 18, 24KLA-TENCOR Corporation
12001134 Reflective mask blank, reflective mask, method of manufacturing reflective mask blank, and method of manufacturing reflective maskNov 22, 23Jun 04, 24AGC Inc.
11982936 Photomask and method of fabricating a photomaskJun 30, 22May 14, 24TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
11971653 Photomask blank, method for producing photomask, and photomaskApr 20, 20Apr 30, 24Shin-Etsu Chemical Co. Ltd.
11927880 Phase shift blankmask and photomask for EUV lithographyJan 10, 22Mar 12, 24S&S TECH CO., LTD.
11914281 Reflective mask blank, reflective mask, and method for manufacturing semiconductor deviceDec 23, 19Feb 27, 24501 Hoya Corporation
11906897 Method for extreme ultraviolet lithography mask treatmentJun 17, 21Feb 20, 24Taiwan Semiconductor Manufacturing Co., Ltd.
11852964 Method for manufacturing reflective mask blank, reflective mask blank, method for manufacturing reflective mask, reflective mask, and method for manufacturing semiconductor deviceMay 20, 21Dec 26, 23501 Hoya Corporation

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Recent Publications

Publication #TitleFiling DatePub DatePatent Owner
2025/0068,054 Mask and Reticle Protection with Atomic Layer Deposition (ALD)Nov 13, 24Feb 27, 25Not available
2024/0427,228 PHOTOMASK BLANK, PHOTOMASK, AND MANUFACTURING METHOD OF PHOTOMASKJun 12, 24Dec 26, 24Kioxia Corporation
2024/0419,064 PHASE SHIFT MASK AND METHOD FOR MANUFACTURING PHASE SHIFT MASKJan 30, 23Dec 19, 24Not available
2024/0377,722 MASK AND METHOD OF FORMING THE SAMEJul 22, 24Nov 14, 24Taiwan Semiconductor Manufacturing Company Ltd.
2024/0345,467 BLANK MASK AND METHOD OF FABRICATING THE SAMEApr 17, 24Oct 17, 24Not available
2024/0302,732 PHASE SHIFT MASK BLANK, PHASE SHIFT MASK, AND METHOD FOR MANUFACTURING PHASE SHIFT MASKMar 15, 22Sep 12, 24Not available
2024/0295,807 REFLECTIVE MASK BLANK, REFLECTIVE MASK, METHOD OF MANUFACTURING REFLECTIVE MASK BLANK, AND METHOD OF MANUFACTURING REFLECTIVE MASKApr 29, 24Sep 05, 24AGC Inc.
2024/0126,162 PHASE SHIFT BLANKMASK AND PHOTOMASK FOR EUV LITHOGRAPHYNov 17, 22Apr 18, 24S&S TECH CO., LTD.
2024/0126,163 PHASE SHIFT BLANKMASK AND PHOTOMASK FOR EUV LITHOGRAPHYJan 24, 23Apr 18, 24S&S TECH CO., LTD.
2024/0012,322 PHOTOMASK STRUCTUREJul 31, 22Jan 11, 24United Microelectronics Corp.
2023/0367,199 Reflective Photomask Blank, and Method for Manufacturing Reflective PhotomaskApr 27, 23Nov 16, 23Shin-Etsu Chemical Co., Ltd.
2023/0333,461 PHASE SHIFT MASK BLANK, PHASE SHIFT MASK, AND METHOD FOR MANUFACTURING PHASE SHIFT MASKSep 07, 21Oct 19, 23Not available
2023/0236,494 REFLECTIVE HOLOGRAPHIC PHASE MASKSJan 25, 23Jul 27, 23Not available
2023/0168,574 LAMINATE FOR BLANK MASK AND MANUFACTURING METHOD FOR THE SAMENov 28, 22Jun 01, 23SKC solmics Co., Ltd.
2023/0030,141 BLANK MASK AND PHOTOMASK USING THE SAMEJul 12, 22Feb 02, 23SKC solmics Co., Ltd.
2022/0390,827 LITHOGRAPHY MASK AND METHODSApr 08, 22Dec 08, 22Not available
2022/0317,554 PHOTOMASK BLANK, METHOD FOR PRODUCING PHOTOMASK, AND PHOTOMASKMar 22, 22Oct 06, 22Shin-Etsu Chemical Co. Ltd.
2022/0236,638 PHASE SHIFT MASK BLANK, MANUFACTURING METHOD THEREOF, AND PHASE SHIFT MASKApr 18, 22Jul 28, 22Shin-Etsu Chemical Co., Ltd.
2021/0208,497 MASK BLANK, PHASE-SHIFT MASK, AND SEMICONDUCTOR DEVICE MANUFACTURING METHODMay 08, 19Jul 08, 21501 Hoya Corporation
2021/0096,454 PHOTOMASK HAVING MULTI-LAYERED TRANSFER PATTERNSDec 11, 20Apr 01, 21SK hynix Inc.

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Patents Issued To Date - By Filing Year

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