Description
Class G01Q : SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING-PROBE MICROSCOPY [SPM]
Subclass 40/02: Calibration, e.g. of probes Calibration standards or methods of fabrication thereof
G01Q 40/02
Sub-Class
Stats
- 18 US PATENTS IN FORCE
- 6 US APPLICATIONS PENDING
- 7 Total Patent Owners
- 67 TOTAL INVENTORS
Recent Patents
| Patent # | Title | Filing Date | Issue Date | Patent Owner |
|---|---|---|---|---|
| 11852581 | Method for calibrating nano measurement scale and standard material used therein | Jun 03, 21 | Dec 26, 23 | Korea Research Institute of Standards and Science |
| 11796563 | Apparatus and method for a scanning probe microscope | Jan 25, 22 | Oct 24, 23 | Carl Zeiss SMT GmbH |
| 11680963 | Method and apparatus for examining a measuring tip of a scanning probe microscope | Dec 15, 21 | Jun 20, 23 | Carl Zeiss SMT GmbH |
| 11592289 | Reference-standard device for calibration of measurements of length, and corresponding calibration process | May 19, 17 | Feb 28, 23 | Istituto Nazionale di Ricerca Metrologica (I.N.RI.M.) |
| 11320457 | System and method of performing scanning probe microscopy on a substrate surface | Jul 24, 19 | May 03, 22 | Nederlandse Organisatie voor Toegepast-Natuurwetenschappelijk Onderzoek TNO |
| 11237187 | Method and apparatus for examining a measuring tip of a scanning probe microscope | Jan 07, 20 | Feb 01, 22 | Carl Zeiss SMT GmbH |
| 11237185 | Apparatus and method for a scanning probe microscope | Sep 27, 19 | Feb 01, 22 | Carl Zeiss SMT GmbH |
| 10648801 | System and method for generating and analyzing roughness measurements and their use for process monitoring and control | Feb 22, 19 | May 12, 20 | Fractilia, LLC |
| 10620100 | Non-contact velocity measurement instruments and systems, and related methods | Jul 25, 17 | Apr 14, 20 | Battelle Energy Alliance LLC |
| 10578643 | Determining interaction forces in a dynamic mode AFM during imaging | Aug 17, 16 | Mar 03, 20 | NEDERLANDSE ORGANISATIE VOOR TOEGEPAST- NATUURWETENSCHAPPELIJK ONDERZOEK TNO |
| 10473692 | Method of calibrating a nanometrology instrument | Sep 22, 15 | Nov 12, 19 | The Government of the United States of America, as represented by the Secretary of the Navy |
| 10444259 | Automatic calibration and tuning of feedback systems | Aug 24, 16 | Oct 15, 19 | Technion Research & Development Foundation Limited |
| 10012675 | Nanometer standard prototype and method for manufacturing nanometer standard prototype | Nov 11, 11 | Jul 03, 18 | KWANSEI GAKUIN EDUCATIONAL FOUNDATION |
| 9797924 | Calibration standard with pre-determined features | Apr 17, 13 | Oct 24, 17 | SEAGATE TECHNOLOGY LLC |
| 9200883 | Transferable probe tips | May 05, 11 | Dec 01, 15 | INTERNATIONAL BUSINESS MACHINES CORPORATION |
| 8739310 | Characterization structure for an atomic force microscope tip | Apr 24, 13 | May 27, 14 | COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES, NANOTOOLS GMBH, |
| 8443460 | Method and structure for characterising an atomic force microscopy tip | Oct 18, 10 | May 14, 13 | COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES, Commissariat à l′ énergie atomique et aux énergies alternatives, |
| 8109135 | Cantilever assembly | Nov 04, 04 | Feb 07, 12 | NANO WORLD AG |
Recent Publications
| Publication # | Title | Filing Date | Pub Date | Patent Owner |
|---|---|---|---|---|
| 2024/0241,151 | SYSTEM FOR PERFORMING ATOMIC FORCE MICROSCOPY, INCLUDING A GRID PLATE QUALIFICATION TOOL | May 18, 22 | Jul 18, 24 | Not available |
| 2024/0219,826 | METHOD OF REMOVING DEFECT OF MASK | Nov 29, 23 | Jul 04, 24 | Samsung Electronics Co., Ltd. |
| 2024/0210,443 | FIDUCIAL MARKER DESIGN, FIDUCIAL MARKER, SCANNING PROBE MICROSCOPY DEVICE AND METHOD OF CALIBRATING A POSITION OF A PROBE TIP | Apr 28, 22 | Jun 27, 24 | Not available |
| 2024/0110,939 | AUTOMATED LANDING METHOD OF A SCANNING PROBE MICROSCOPY SYSTEM AND SCANNING PROBE MICROSCOPY SYSTEM USING THE SAME | Feb 09, 22 | Apr 04, 24 | Not available |
| 2024/0069,064 | PROBE ASSESSMENT METHOD AND SPM | Jun 09, 21 | Feb 29, 24 | Shimadzu Corporation |
| 2023/0228,792 | STANDARD SAMPLE AND MANUFACTURING METHOD THEREOF | May 14, 20 | Jul 20, 23 | Not available |
Top Owners in This Subclass
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Patents Issued To Date - By Filing Year
Average Time to Issuance
- 35 Months (last 2 years Issuances)
- 35 Months (last 5 years Issuances)