H01L 21/02

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Class  H01L : SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR


Subclass 21/02: Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof Manufacture or treatment of semiconductor devices or of parts thereof

Recent Patents

Patent #TitleFiling DateIssue DatePatent Owner
12263452 Gas solution supply deviceSep 29, 21Apr 01, 25Ebara Corporation
12264275 Treatment liquidAug 23, 22Apr 01, 25FUJIFILM Corporation
12265046 Heterostructure semiconductor, chemiresistive gas sensor made thereof, and method of fabrication thereofAug 10, 21Apr 01, 25Indian Institute of Science
12265328 Photoactive, inorganic ligand-capped inorganic nanocrystalsJun 12, 23Apr 01, 25The Argonne National Laboratory The University of Chicago Development
12266520 Method for manufacturing epitaxial wafer, silicon-based substrate for epitaxial growth, and epitaxial waferSep 06, 19Apr 01, 25Shin-Etsu Handotai Co Ltd.
12266521 Oxide-nitride-oxide stack having multiple oxynitride layersSep 15, 22Apr 01, 25LONGITUDE FLASH MEMORY SOLUTIONS LTD.
12266522 Substrate processing apparatus, method of manufacturing semiconductor device and non-transitory computer-readable recording mediumJan 19, 24Apr 01, 25Kokusai Electric Corporation
12266523 Parasitic capacitance reduction in GaN-on-silicon devicesFeb 05, 24Apr 01, 25MACOM Technology Solutions Holdings, Inc.
12266524 Method for depositing boron containing silicon germanium layersJun 11, 21Apr 01, 25ASM IP Holding B.V.
12266525 Photomask pellicle including network of nanowires and method of forming the sameJan 30, 24Apr 01, 25Taiwan Semiconductor Manufacturing Company Ltd.
12266526 Formation of single crystal semiconductors using planar vapor liquid solid epitaxyOct 03, 23Apr 01, 25Taiwan Semiconductor Manufacturing Co., Ltd.
12266533 Sacrificial capping layer for contact etchApr 15, 22Apr 01, 25Tokyo Electron Limited
12266535 Mask encapsulation to prevent degradation during fabrication of high aspect ratio featuresSep 23, 20Apr 01, 25Lam Researh Corporation
12266538 Method for manufacturing semiconductor device using etchant composition having high etching selectivityFeb 17, 22Apr 01, 25TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
12266540 Method for fabricating layer structure having target topological profileDec 06, 23Apr 01, 25ASM IP Holding B.V.
12266541 Semiconductor device and methodJun 17, 21Apr 01, 25Taiwan Semiconductor Manufacturing Co., Ltd.
12266567 Method of forming a barrier layer in an interconnect structure of semiconductor deviceApr 27, 22Apr 01, 25Taiwan Semiconductor Manufacturing Co., Ltd.
12266573 Transistor isolation regions and methods of forming the sameSep 23, 21Apr 01, 25Taiwan Semiconductor Manufacturing Company Ltd.
12266576 Semiconductor device and methods of manufactureJul 18, 22Apr 01, 25Taiwan Semiconductor Manufacturing Company Ltd.
12266579 Method and system for adjusting the gap between a wafer and a top plate in a thin-film deposition processAug 30, 21Apr 01, 25Taiwan Semiconductor Manufacturing Co., Ltd.

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Recent Publications

Publication #TitleFiling DatePub DatePatent Owner
2025/0118,539 METHOD TO IMPROVE WAFER EDGE UNIFORMITYOct 16, 24Apr 10, 25Applied Materials Inc.
2025/0118,547 METHODS OF FORMING MEMORY STRUCTURES FOR THREE-DIMENSIONAL NONVOLATILE MEMORYOct 04, 24Apr 10, 25Not available
2025/0118,548 HEAT DISSIPATION FOR FIELD EFFECT TRANSISTORSJan 03, 24Apr 10, 25Not available
2025/0118,549 METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE CAPABLE OF CONTROLLING FILM THICKNESS DISTRIBUTIONDec 19, 24Apr 10, 25Kokusai Electric Corporation
2025/0118,550 SUBSTRATE-PROCESSING METHOD AND SUBSTRATE-PROCESSING APPARATUSDec 16, 24Apr 10, 25Not available
2025/0118,551 SEED CRYSTAL SUBSTRATE AND GRAPHITE SUSCEPTOR WITH SEED CRYSTAL SUBSTRATEJul 25, 24Apr 10, 25KABUSHIKI KAISHA TOYOTA CHUO KENKYUSHO
2025/0118,552 METHOD FOR PRODUCING A CONTINUOUS NITRIDE LAYEROct 09, 24Apr 10, 25Commissariat A L' Energie Atomique Et Aux Energies Alternatives; Centre National De La Recherche Scientifique (CNRS); UNIVERSITE GRENOBLE ALPES; INSTITUT POLYTECHNIQUE DE GRENOBLE;
2025/0118,553 2D Material Stack FormationOct 02, 24Apr 10, 25Not available
2025/0118,554 MANUFACTURING METHOD AND MANUFACTURING APPARATUS OF SEMICONDUCTOR SUBSTRATE, AND CONTROL DEVICEJan 26, 23Apr 10, 25KYOCERA CORPORATION
2025/0118,562 DEPOSITION OF ORGANIC FILMSDec 16, 24Apr 10, 25Not available
2025/0118,564 Method for Thinning a Semiconductor SubstrateOct 04, 24Apr 10, 25Not available
2025/0118,568 REDUCED TEMPERATURE ETCHING OF DOPED SILICON OXIDEMay 23, 23Apr 10, 25Not available
2025/0118,576 CHAMBER KITS, PROCESSING CHAMBERS, AND METHODS FOR GAS ACTIVATION IN SEMICONDUCTOR MANUFACTURINGDec 20, 23Apr 10, 25Not available
2025/0118,613 HEMT TRANSISTORSep 20, 24Apr 10, 25Not available
2025/0115,691 METHOD OF FORMING PATTERNSDec 16, 24Apr 10, 25Not available
2025/0115,786 POLISHING COMPOSITION FOR SEMICONDUCTOR PROCESS AND POLISHING METHOD OF SUBSTRATE USING THE SAMESep 30, 24Apr 10, 25SK enpulse Co., Ltd.
2025/0120,061 3D DRAM WITH ENLARGE-LESS TRIMOct 03, 24Apr 10, 25Applied Materials Inc.
2025/0120,068 PRECURSOR STRUCTURE FOR SELF-ALIGNED BIT LINE AND STORAGE NODE CONTACTS FOR 4F2 DRAMOct 02, 24Apr 10, 25Applied Materials Inc.
2025/0120,130 SEMICONDUCTOR DEVICE INCLUDING TWO-DIMENSIONAL MATERIAL AND METHOD OF FABRICATING THE SEMICONDUCTOR DEVICESep 04, 24Apr 10, 25Samsung Electronics Co., Ltd.
2025/0120,150 THIN FILM STRUCTURE AND METHOD OF MANUFACTURING THE THIN FILM STRUCTUREMay 24, 24Apr 10, 25Samsung Electronics Co., Ltd.

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