Class G01Q : SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING-PROBE MICROSCOPY [SPM]
Subclass 30/06: Auxiliary means serving to assist or improve the scanning probe techniques or apparatus, e.g. display or data processing devices Display or data processing devices for error compensation
| Patent # | Title | Filing Date | Issue Date | Patent Owner |
|---|---|---|---|---|
| 12188960 | Active noise isolation for tunneling applications (ANITA) | Jan 24, 19 | Jan 07, 25 | The Penn State Research Foundation |
| 12142454 | Detection of probabilistic process windows | Sep 10, 21 | Nov 12, 24 | Fractilla, LLC |
| 11996265 | System and method for generating and analyzing roughness measurements and their use for process monitoring and control | Jan 25, 22 | May 28, 24 | Fractilla, LLC |
| 11835547 | Method for detecting mechanical and magnetic features with nanoscale resolution | Feb 25, 22 | Dec 05, 23 | Not available |
| 11796565 | AFM imaging with metrology-preserving real time denoising | Apr 09, 21 | Oct 24, 23 | Bruker Nano, Inc. |
| 11733265 | Method of imaging a surface using a scanning probe microscope | Oct 23, 20 | Aug 22, 23 | INFINITESIMA LIMITED |
| 11714104 | AFM imaging with creep correction | May 25, 21 | Aug 01, 23 | Bruker Nano, Inc. |
| 11670480 | System and method for generating and analyzing roughness measurements | May 10, 21 | Jun 06, 23 | Fractilia, LLC |
| 11604210 | AFM imaging with real time drift correction | Jul 08, 21 | Mar 14, 23 | Bruker Nano, Inc. |
| 11521825 | System and method for predicting stochastic-aware process window and yield and their use for process monitoring and control | Mar 12, 21 | Dec 06, 22 | Fractilia, LLC |
| 11508546 | System and method for low-noise edge detection and its use for process monitoring and control | Mar 12, 21 | Nov 22, 22 | Fractilia, LLC |
| 11448663 | Pattern height information correction system and pattern height information correction method | Aug 04, 20 | Sep 20, 22 | HITACHI HIGH-TECH CORPORATION |
| 11415596 | Scanning probe microscope and analysis method | Jan 29, 18 | Aug 16, 22 | Shimadzu Corporation |
| 11380516 | System and method for generating and analyzing roughness measurements and their use for process monitoring and control | Nov 13, 20 | Jul 05, 22 | Fractilia, LLC |
| 11361937 | System and method for generating and analyzing roughness measurements and their use for process monitoring and control | Nov 24, 20 | Jun 14, 22 | Fractilia, LLC |
| 11355306 | System and method for generating and analyzing roughness measurements and their use for process monitoring and control | Nov 13, 20 | Jun 07, 22 | Fractilia, LLC |
| 11320455 | System and method for autonomous scanning probe microscopy with in-situ tip conditioning | Mar 19, 19 | May 03, 22 | The Governors of the University of Alberta; QUANTUM SILICON INC.; |
| 11226285 | Surface sensitive atomic force microscope based infrared spectroscopy | Jul 09, 18 | Jan 18, 22 | Bruker Nano, Inc. |
| 11145049 | Method for analyzing polymer membrane | Jul 16, 18 | Oct 12, 21 | LG Chem, Ltd |
| 11004654 | System and method for generating and analyzing roughness measurements | Dec 30, 19 | May 11, 21 | Fractilia, LLC |
| Publication # | Title | Filing Date | Pub Date | Patent Owner |
|---|---|---|---|---|
| 2025/0069,843 | Detection of Probabilistic Process Windows | Nov 11, 24 | Feb 27, 25 | Fractilia, LLC |
| 2025/0004,010 | ATOMIC FORCE MICROSCOPE (AFM) DEVICE AND METHOD OF OPERATING THE SAME | Dec 23, 22 | Jan 02, 25 | Not available |
| 2024/0312,757 | SYSTEM AND METHOD FOR GENERATING AND ANALYZING ROUGHNESS MEASUREMENTS AND THEIR USE FOR PROCESS MONITORING AND CONTROL | May 24, 24 | Sep 19, 24 | Fractilia, LLC |
| 2024/0295,583 | POSITIONING SYSTEM AND METHOD | Jan 24, 22 | Sep 05, 24 | Not available |
| 2024/0258,066 | Method of Dispositioning and Control of a Semiconductor Manufacturing Process | Jan 17, 24 | Aug 01, 24 | Fractilia, LLC |
| 2024/0241,151 | SYSTEM FOR PERFORMING ATOMIC FORCE MICROSCOPY, INCLUDING A GRID PLATE QUALIFICATION TOOL | May 18, 22 | Jul 18, 24 | Not available |
| 2024/0210,442 | METHOD OF CALIBRATING IN A SCANNING PROBE MICROSCOPY SYSTEM AN OPTICAL MICROSCOPE, CALIBRATION STRUCTURE AND SCANNING PROBE MICROSCOPY DEVICE | Apr 28, 22 | Jun 27, 24 | Not available |
| 2022/0155,339 | SYSTEM AND METHOD FOR AUTONOMOUS SCANNING PROBE MICROSCOPY WITH IN-SITU TIP CONDITIONING | Jan 22, 22 | May 19, 22 | QUANTUM SILICON INC.; The Governors of the University of Alberta; |
| 2021/0066,027 | SYSTEM AND METHOD FOR GENERATING AND ANALYZING ROUGHNESS MEASUREMENTS AND THEIR USE FOR PROCESS MONITORING AND CONTROL | Nov 13, 20 | Mar 04, 21 | Fractilia, LLC |
| 2021/0055,326 | SCANNING PROBE MICROSCOPE AND ANALYSIS METHOD | Jan 29, 18 | Feb 25, 21 | Not available |
| 2019/0369,138 | METHOD FOR ERROR CORRECTION IN SCANNING PROBE MICROSCOPY | Jul 12, 17 | Dec 05, 19 | Not available |
| 2019/0293,680 | SCANNING PROBE MICROSCOPE | Jun 02, 16 | Sep 26, 19 | Shimadzu Corporation |
| 2018/0364,277 | A METHOD TO MEASURE NANOSCALE MECHANICAL PROPERTIES USING ATOMIC FORCE MICROSCOPY WITHOUT INITIALLY CHARACTERIZING CANTILEVER TIP GEOMETRY | Dec 08, 16 | Dec 20, 18 | Not available |
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