Metrological scanning probe microscope

Number of patents in Portfolio can not be more than 2000

United States of America

PATENT NO RE49997
SERIAL NO

17365671

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Abstract

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This invention relates to a metrological scanning probe microscope system combining an SPM which employs an optical lever arrangement to measure displacement of the probe indirectly with another SPM which measures the displacement of the probe directly through the use of an interferometric detection scheme.

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Patent Owner(s)

Patent OwnerAddress
OXFORD INSTRUMENTS ASYLUM RESEARCH INCGOLETA CA

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Cleveland, Jason Santa Barbara, US 45 304
Labuda, Aleksander Goleta, US 14 37
Proksch, Roger Santa Barbara, US 57 377
Walters, Deron Santa Barbara, US 9 14

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