Beam grid layout
Number of patents in Portfolio can not be more than 2000
United States of America
Stats
-
Apr 30, 2024
Grant Date -
N/A
app pub date -
Apr 2, 2020
filing date -
Apr 2, 2020
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
A sub-beam aperture array for forming a plurality of sub-beams from one or more charged particle beams. The sub-beam aperture array comprises one or more beam areas, each beam area comprising a plurality of sub-beam apertures arranged in a non-regular hexagonal pattern, the sub-beam apertures arranged so that, when projected in a first direction onto a line parallel to a second direction, the sub-beam apertures are uniformly spaced along the line, and wherein the first direction is different from the second direction. The system further comprises a beamlet aperture array with a plurality of beamlet apertures arranged in one or more groups. The beamlet aperture array is arranged to receive the sub-beams and form a plurality of beamlets at the locations of the beamlet apertures of the beamlet array.
First Claim
Other Claims data not available
Family
International Classification(s)
- 2020 Application Filing Year
- H01J Class
- 2540 Applications Filed
- 1680 Patents Issued To-Date
- 66.15 % Issued To-Date
Cited Art Landscape
Patent Citation Ranking
- 0 Citation Count
- H01J Class
- 0 % this patent is cited more than
- 1 Age
Maintenance Fees
| Fee | Large entity fee | small entity fee | micro entity fee | due date |
|---|---|---|---|---|
| 3.5 Year Payment | $1600.00 | $800.00 | $400.00 | Oct 30, 2027 |
| 7.5 Year Payment | $3600.00 | $1800.00 | $900.00 | Oct 30, 2031 |
| 11.5 Year Payment | $7400.00 | $3700.00 | $1850.00 | Oct 30, 2035 |