Lithographic apparatus and a device manufacturing method

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United States of America Patent

PATENT NO RE49297
SERIAL NO

16656627

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Abstract

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An immersion lithographic apparatus is provided having a substrate table including a drain configured to receive immersion fluid which leaks into a gap between an edge of a substrate on the substrate table and an edge of a recess in which the substrate is located. A thermal conditioning system is provided to thermally condition at least the portion of the recess supporting the substrate by directing one or more jets of fluid onto a reverse side of the section supporting the substrate.

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Patent Owner(s)

Patent OwnerAddress
ASML NETHERLANDS B VP O BOX 324 VELDHOVEN 5500 AH

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Bloks, Ruud Hendricus Martinus Johannes Helmond, NL 5 61
Feng, Peng Veldhoven, NL 26 60
Jacobs, Johannes Henricus Wilhelmus Heeze, NL 100 1179
Kunnen, Johan Gertrudis Cornelis Weert, NL 35 290
Kusters, Gerardus Adrianus Antonius Maria Eindhoven, NL 11 99
Laurent, Thibault Simon Mathieu Eindhoven, NL 43 333
Miranda, Marcio Alexandre Cano Eindhoven, NL 19 267
Patel, Hrishikesh Eindhoven, NL 12 57

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