Inspection method and apparatus and lithographic processing cell

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United States of America Patent

PATENT NO RE49199
SERIAL NO

14629351

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Abstract

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A method of calculating process corrections for a lithographic tool, and associated apparatuses. The method comprises measuring process defect data on a substrate that has been previously exposed using the lithographic tool; fitting a process signature model to the measured process defect data, so as to obtain a model of the process signature for the lithographic tool; and using the process signature model to calculate the process corrections for the lithographic tool.

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Patent Owner(s)

Patent OwnerAddress
ASML NETHERLANDS B VP O BOX 324 VELDHOVEN 5500 AH

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Aben, Paul Cornelis Hubertus Eindhoven, NL 6 14
Kubis, Michael Düsseldorf, DE 32 916
Mos, Everhardus Cornelis Best, NL 81 800
Schoumans, Nicole 's-Hertogenbosch, NL 4 31
Simons, Hubertus Johannes Gertrudus Venlo, NL 25 367
Ten, Berge Peter Eindhoven, NL 28 131

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