Chucks and clamps for holding objects of a lithographic apparatus and methods for controlling a temperature of an object held by a clamp of a lithographic apparatus

Number of patents in Portfolio can not be more than 2000

United States of America

PATENT NO RE49066
SERIAL NO

16804549

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Importance

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Abstract

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A lithographic apparatus includes a clamp (406) configured to receive an object (402). The clamp defines at least one channel (408) configured to pass a fluid at a first fluid temperature. The lithographic apparatus also includes a chuck (404) coupled to the clamp. The chuck (404) defines at least one void (464) configured to thermally insulate the chuck from the clamp.

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Patent Owner(s)

Patent OwnerAddress
ASML NETHERLANDS B VP O BOX 324 VELDHOVEN 5500 AH

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Chieda, Michael Andrew Easton, US 5 20
Koevoets, Adrianus Hendrik Mierlo, NL 29 112
Lafarre, Raymond Wilhelmus Louis Helmond, NL 93 713
Nelson, Michael Leo Redding, US 4 6
O'Connor, Geoffrey Easton, US 6 88
Uitterdijk, Tammo Wilton, US 44 291
Van, Der Sanden Jacobus Cornelis Gerardus Geldrop, NL 13 312

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