Formation of a lithium comprising structure on a substrate by ALD
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United States of America
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Dec 14, 2021
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app pub date -
Jan 25, 2019
filing date -
Jan 25, 2019
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Abstract
A method for the formation of lithium includes a layer on a substrate using an atomic layer deposition method. The method includes the sequential pulsing of a lithium precursor through a reaction chamber for deposition upon a substrate. Using further oxidizing pulses and or other metal containing precursor pulses, an electrolyte suitable for use in thin film batteries may be manufactured.
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