Template having a varying thickness to facilitate expelling a gas positioned between a substrate and the template
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United States of America Patent
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Jul 2, 2019
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N/A
app pub date -
Oct 14, 2015
filing date -
Oct 14, 2015
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Abstract
A nanoimprint lithography template including, inter alia, a body having first and second opposed sides with a first surface disposed on the first side, the second side having a recess disposed therein, the body having first and second regions with the second region surrounding the first region and the recess in superimposition with the first region, with a portion of the first surface in superimposition with the first region being spaced-apart from the second side a first distance and a portion of the first surface in superimposition with the second region being spaced-apart from the second side a second distance, with the second distance being greater than the first distance; and a mold disposed on the first side of the body in superimposition a portion of the first region.
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