Apparatus and method for providing uniform flow of gas
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United States of America Patent
Stats
-
Jun 18, 2019
Grant Date -
N/A
app pub date -
Aug 16, 2017
filing date -
Oct 19, 2011
priority date (Note) -
In Force
status (Latency Note)
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Abstract
Provided are gas distribution apparatus with a delivery channel having an inlet end, an outlet end and a plurality of apertures spaced along the length. The inlet end is connectable to an inlet gas source and the outlet end is connectable with a vacuum source. Also provided are gas distribution apparatus with spiral delivery channels, intertwined spiral delivery channels, splitting delivery channels, merging delivery channels and shaped delivery channels in which an inlet end and outlet end are configured for rapid exchange of gas within the delivery channels.
First Claim
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International Classification(s)
- 2017 Application Filing Year
- F16K Class
- 2135 Applications Filed
- 1600 Patents Issued To-Date
- 74.95 % Issued To-Date
Cited Art Landscape
Patent Citation Ranking
- 306 Citation Count
- F16K Class
- 99.61 % this patent is cited more than
- 6 Age
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