Imprint pattern forming method
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United States of America Patent
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Oct 23, 2018
Grant Date -
N/A
app pub date -
Oct 12, 2016
filing date -
Oct 12, 2016
priority date (Note) -
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Abstract
An imprint pattern forming method includes contacting a template with a pattern in a front surface with an imprint material formed in a substrate to fill the imprint material into the pattern, curing the imprint material filled in the pattern to form an imprint material pattern, and after forming the imprint material pattern, separating the template from the imprint material pattern while applying pressure to the back surface of the template.
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