Drop recipe creating method, database creating method and medium
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United States of America Patent
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Jun 19, 2018
Issued Date -
N/A
app pub date -
Oct 14, 2015
filing date -
Nov 22, 2010
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
According to one embodiment, a plurality of test drop recipes are first created based on design data on a semiconductor integrated circuit. Based on a defect inspection result of a pattern of a hardening resin material, which is formed by pressing a template on which patterns of the semiconductor integrated circuit are formed onto the hardening resin material applied to a substrate to be processed by use of the test drop recipes, a drop recipe with least defects is selected per press position on the substrate to be processed from the test drop recipes. The selected drop recipes for respective press positions are collected per functional circuit block configuring the semiconductor integrated circuit, thereby to generate a drop recipe creation assistant database.
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