Regenerative ring resonator

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United States of America Patent

PATENT NO RE45957
SERIAL NO

13786795

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Abstract

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A laser includes a regenerative ring resonator that includes a discharge chamber having electrodes and a gain medium between the electrodes for producing a laser beam; a partially-reflective optical coupler, and a beam modification optical system in the path of the laser beam. The beam modification optical system transversely expands a profile of the laser beam such that the near field laser beam profile uniformly fills each aperture within the laser and such that the regenerative ring resonator remains either conditionally stable or marginally unstable when operating the laser at powers that induce thermal lenses in optical elements inside the regenerative ring resonator.

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Patent Owner(s)

Patent OwnerAddress
CYMER LLC17075 THORNMINT COURT SAN DIEGO CA 92127

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Brown, Daniel J W San Diego, US 50 1139
Rafac, Robert J Encinitas, US 28 253
Rokitski, Rostislav La Jolla, US 14 77
Sandstrom, Richard L Encinitas, US 136 5606
Ye, Hong San Diego, US 64 262

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