Support for microelectronic, microoptoelectronic or micromechanical devices

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO RE44255
SERIAL NO

12150287

Stats

ATTORNEY / AGENT: (SPONSORED)

Importance

Loading Importance Indicators... loading....

Abstract

See full text

The specification teaches a device for use in the manufacturing of microelectronic, microoptoelectronic or micromechanical devices (microdevices) in which a contaminant absorption layer improves the life and operation of the microdevice. In a preferred embodiment the invention includes a mechanical supporting base, and discrete deposits of gas absorbing or contaminant removing material on the base by a variety of techniques and a layer for temporary protection of the contaminant removing material on top of the contaminant removing material. Passages are created in the layer which expose the contaminant removing material to atmosphere. The device may be used as a covering for the microdevice as well.

Loading the Abstract Image... loading....

First Claim

See full text

Family

Loading Family data... loading....

Patent Owner(s)

  • SAES GETTERS S.P.A.;SAES GETTER S.P.A.

International Classification(s)

  • [Classification Symbol]
  • [Patents Count]

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Amiotti, Marco Milan, IT 25 257

Cited Art Landscape

Load Citation

Patent Citation Ranking

Forward Cite Landscape

Load Citation