Magnetic bearing device with vibration restraining function, magnetic bearing device with vibration estimating function, and pump device with the magnetic bearing devices mounted thereto
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United States of America Patent
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Dec 15, 2009
Grant Date -
N/A
app pub date -
Dec 29, 2005
filing date -
Sep 3, 2002
priority date (Note) -
Expired
status (Latency Note)
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Abstract
Disclosed are a magnetic bearing device with a vibration restraining function, a magnetic bearing device with a vibration estimating function, and a pump device with the magnetic bearing devices mounted thereto, in which it is possible to realize a reduction in vibration in the apparatus system as a whole inclusive of the equipment associated with the vacuum pump without newly providing a vibration sensor. In a vibration detector, a multiplication result obtained by multiplying the Laplace transformation of a displacement of a rotor by a predetermined transfer function is added to a multiplication result obtained by multiplying the Laplace transformation of a variation in an unbalance force acting on the rotor by the reciprocal of the mass of the rotor. The result of this calculation is reversed in polarity and is added to the output of a compensator by an adder.
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