Method of manufacturing a stamper for producing optical discs, a stamper thus obtained and an optical disc obtained by using such a stamper
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United States of America Patent
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Dec 19, 2006
Grant Date -
N/A
app pub date -
Oct 7, 1998
filing date -
Oct 7, 1997
priority date (Note) -
Expired
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Abstract
The invention relates to a method of manufacturing a stamper for producing optical disks, comprising the application of a photoresist to a stamper plate and the structuring of the applied photoresist film. The structuring comprises the successive exposure, development and heating of the photoresist film. The developed photoresist film is subjected to an additional exposure in the deep UV range prior to the final heat treatment. The invention also relates to a stamper and to an optical disk obtained using the stamper.
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