Cutting metallates of refractory metals
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Jun 3, 2003
Grant Date -
N/A
app pub date -
Oct 22, 1998
filing date -
Oct 22, 1998
priority date (Note) -
Expired
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Abstract
Lithium niobate and tantalate crystal rods or boules are sawed to wafers with diamond edged saws in the presence of inert fluorinated lubricating liquids.
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