Collimator for use in a physical vapor deposition (PVD) chamber

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United States of America Design

PATENT NO D998575
SERIAL NO

29730633

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APPLIED MATERIALS INC3050 BOWERS AVENUE SANTA CLARA CA 95054

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Kalathiparambil, Kishor Kumar Santa Clara, US 8 12
Riker, Martin Lee Milpitas, US 49 688
Zhang, Fuhong San Jose, US 41 840
Zhong, Lanlan Santa Clara, US 11 35

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