Self-centering wafer carrier for chemical vapor deposition

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United States of America Design

PATENT NO D810705
SERIAL NO

29559977

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Patent Owner(s)

Patent OwnerAddress
VEECO INSTRUMENTS INC1 TERMINAL DRIVE PLAINVIEW NY 11803

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Chang, Chenghung Paul Easton, US 9 1234
Gurary, Alexander I Bridgewater, US 51 2967
Krishnan, Sandeep Jersey City, US 48 1752
Marcelo, Earl Franklin Park, US 7 1192

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