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• 15 United States
• 10 France
• 8 Japan
• 7 China
• 5 Korea
• 2 Other

Patent Owner(s)

Patent Owner	Address
OMS INVESTMENTS INC	10250 CONSTELLATION BOULEVARD SUITE 2800 LOS ANGELES CA 90067

International Classification(s)

• 0801:TOOLS AND IMPLEMENTS FOR DRILLING, MILLING OR DIGG....

• 2015 Application Filing Year
• 0801 Class
• 106 Applications Filed
• 106 Patents Issued To-Date
• 100 % Issued To-Date

Inventor(s)

Inventor Name	Address	# of filed Patents	Total Citations
Berger, Ryan R	Columbus, US	64	563
# of filed Patents : 64 Total Citations : 563
Goodwin, Randy M	Grove City, US	18	105
# of filed Patents : 18 Total Citations : 105
Havlovitz, Paul	Dublin, US	27	420
# of filed Patents : 27 Total Citations : 420
Hsu, Paul	Lewis Center, US	27	155
# of filed Patents : 27 Total Citations : 155
Kopczewski, Michael T	Grove City, US	37	488
# of filed Patents : 37 Total Citations : 488
Martin, Timothy Michael	Westerville, US	16	139
# of filed Patents : 16 Total Citations : 139
Perkins, Jay F	Pickerington, US	89	835
# of filed Patents : 89 Total Citations : 835

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Patent Citation Ranking

• 6 Citation Count
• 0801 Class

• 0 % this patent is cited more than
• 8 Age

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Maintenance Fees

Fee	Large entity fee	small entity fee	micro entity fee	due date
11.5 Year Payment	$7400.00	$3700.00	$1850.00	Aug 28, 2028

Fee	Large entity fee	small entity fee	micro entity fee
Surcharge - 11.5 year - Late payment within 6 months	$160.00	$80.00	$40.00
Surcharge after expiration - Late payment is unavoidable	$700.00	$350.00	$175.00
Surcharge after expiration - Late payment is unintentional	$1,640.00	$820.00	$410.00

Full Text

US Patent No: 9640364

Charged particle beam system and method of operating a charged particle beam system

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Abstract

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The present disclosure relates to a gas field ion source comprising a housing, an electrically conductive tip arranged within the housing, a gas supply for supplying one or more gases to the housing, wherein the one or more gases comprise neon or a noble gas with atoms having a mass larger than neon, and an extractor electrode having a hole to permit ions generated in the neighborhood of the tip to pass through the hole. A surface of the extractor electrode facing the tip can be made of a material having a negative secondary ion sputter rate of less than 10⁻⁵ per incident neon ion.

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Description

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Claims

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Legal Events

 

• FEPP2024
• MAFP2020
• CC2018
• CC2017
• I2017
• STCF2017
• AS2017
• FEPP2016
• P2016
• F2015

Date	Code	Event	Description
Dec 23, 2024	FEPP	FEE PAYMENT PROCEDURE	free format text: MAINTENANCE FEE REMINDER MAILED (ORIGINAL EVENT CODE: REM.); ENTITY STATUS OF PATENT OWNER: LARGE ENTITY
Sep 20, 2020	MAFP	MAINTENANCE FEE PAYMENT	free format text: PAYMENT OF MAINTENANCE FEE, 4TH YEAR, LARGE ENTITY (ORIGINAL EVENT CODE: M1551); ENTITY STATUS OF PATENT OWNER: LARGE ENTITY year of fee payment: 4
Jul 10, 2018	CC	CERTIFICATE OF CORRECTION
Dec 19, 2017	CC	CERTIFICATE OF CORRECTION
May 02, 2017	I	Issuance
Apr 12, 2017	STCF	INFORMATION ON STATUS: PATENT GRANT	free format text: PATENTED CASE
Jan 26, 2017	AS	ASSIGNMENT	free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNORS:NOTTE, JOHN A., IV;RAHMAN, FHM-FARIDUR;HUANG, WEIJIE;AND OTHERS;SIGNING DATES FROM 20140723 TO 20140728;REEL/FRAME:041093/0209 Owner name: CARL ZEISS MICROSCOPY, LLC, NEW YORK
Dec 05, 2016	FEPP	FEE PAYMENT PROCEDURE	free format text: PAYOR NUMBER ASSIGNED (ORIGINAL EVENT CODE: ASPN); ENTITY STATUS OF PATENT OWNER: LARGE ENTITY
Apr 14, 2016	P	Published
Dec 15, 2015	F	Filing